Piezoelectric amplifiers with integrated actuation and sensing capabilities
dc.contributor.author | THOMAS, Olivier |
dc.contributor.author
hal.structure.identifier | MATHIEU, Fabrice
|
dc.contributor.author | MANSFIELD, W. |
dc.contributor.author | HUANG, C. |
dc.contributor.author | TROLIER MCKINSTRY, Susan |
dc.contributor.author
hal.structure.identifier | NICU, Liviu
|
dc.date.accessioned | 2015 |
dc.date.available | 2015 |
dc.date.issued | 2013 |
dc.date.submitted | 2015 |
dc.identifier.uri | http://hdl.handle.net/10985/10105 |
dc.description.abstract | We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air. |
dc.language.iso | en |
dc.publisher | IEEE |
dc.rights | Post-print |
dc.subject | Piezoelectric |
dc.title | Piezoelectric amplifiers with integrated actuation and sensing capabilities |
dc.typdoc | Communication avec acte |
dc.localisation | Centre de Lille |
dc.subject.hal | Sciences de l'ingénieur: Electronique |
dc.subject.hal | Sciences de l'ingénieur: Mécanique |
dc.subject.hal | Sciences de l'ingénieur: Mécanique: Matériaux et structures en mécanique |
dc.subject.hal | Sciences de l'ingénieur: Mécanique: Mécanique des solides |
dc.subject.hal | Sciences de l'ingénieur: Mécanique: Mécanique des structures |
dc.subject.hal | Sciences de l'ingénieur: Mécanique: Vibrations |
dc.subject.hal | Sciences de l'ingénieur: Micro et nanotechnologies/Microélectronique |
ensam.audience | Internationale |
ensam.conference.title | 26th. IEEE international conference on micro electro mechanical systems (MEMS 2013) |
ensam.conference.date | 2013-01 |
ensam.country | Taiwan |
ensam.title.proceeding | Proc. of the 26yh. IEEE international conference on micro electro mechanical systems (MEMS 2013) |
ensam.page | 0 |
ensam.city | Taipei |
hal.identifier | hal-01203229 |
hal.version | 1 |
hal.status | accept |