Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators
| dc.contributor.author
hal.structure.identifier | DEZEST, Denis
|
| dc.contributor.author
hal.structure.identifier | MATHIEU, Fabrice
|
| dc.contributor.author
hal.structure.identifier | MAZENQ, Laurent
|
| dc.contributor.author
hal.structure.identifier | SOYER, Caroline
|
| dc.contributor.author
hal.structure.identifier | COSTECALDE, Jean
|
| dc.contributor.author
hal.structure.identifier | REMIENS, Denis
|
| dc.contributor.author
hal.structure.identifier | THOMAS, Olivier
|
| dc.contributor.author
hal.structure.identifier | DEÜ, Jean-François
|
| dc.contributor.author
hal.structure.identifier | NICU, Liviu
|
| dc.date.accessioned | 2015 |
| dc.date.available | 2015 |
| dc.date.issued | 2013 |
| dc.date.submitted | 2015 |
| dc.identifier.uri | http://hdl.handle.net/10985/10119 |
| dc.description.abstract | In this work, we demonstrate the integration of piezoelectric actuation means on arrays of nanocantilevers at the wafer scale. We use lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scale |
| dc.language.iso | en |
| dc.rights | Post-print |
| dc.subject | Wafer-scale integration |
| dc.subject | Piezoelectric |
| dc.subject | Nanoelectromecanical systems resonators |
| dc.title | Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators |
| dc.typdoc | Communication avec acte |
| dc.localisation | Centre de Lille |
| dc.subject.hal | Sciences de l'ingénieur: Mécanique: Vibrations |
| dc.subject.hal | Sciences de l'ingénieur: Micro et nanotechnologies/Microélectronique |
| ensam.audience | Internationale |
| ensam.conference.title | 2013 Nanomechanical Sensing Workshop |
| ensam.conference.date | 2013-05 |
| ensam.country | Etats-Unis |
| ensam.title.proceeding | Proceedings of 2013 Nanomechanical Sensing Workshop |
| ensam.page | 0 |
| ensam.city | Stanford, USA |
| hal.identifier | hal-03165172 |
| hal.version | 1 |
| hal.date.transferred | 2021-03-10T13:32:54Z |
| hal.submission.permitted | true |
| hal.status | accept |
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