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dc.contributor.authorBROUSSEAU, Emmanuel
dc.contributor.authorARNAL, Benoît
dc.contributor.author
 hal.structure.identifier
THIERY, Stéphane
104752 Inria Lille - Nord Europe
dc.contributor.author
 hal.structure.identifier
GIBARU, Olivier
104752 Inria Lille - Nord Europe
dc.contributor.author
 hal.structure.identifier
NYIRI, Eric
178374 Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
dc.date.accessioned2016
dc.date.available2016
dc.date.issued2015
dc.date.submitted2015
dc.identifier.isbn9780956679055
dc.identifier.urihttp://hdl.handle.net/10985/10565
dc.description.abstractAtomic Force Microscopy (AFM) probe-based machining allows surface structuring at the nano-scale via the mechanical modification of material. This results from the direct contact between the tip of an AFM probe and the surface of a sample. Given that AFM instruments are primarily developed for obtaining high-resolution topography information of inspected specimen, raster scanning typically defines the trajectory followed by the tip of an AFM probe. Although most AFM manufacturers provide software modules to perform user-defined tip displacement operations, such additional solutions can be limited with respect to 1) the range of tip motions that can be designed, 2) the level of automation when defining tip displacement strategies and 3) the portability for easily transferring trajectories data between different AFM instruments. In this context, this research presents a feasibility study, which aims to demonstrate the applicability of a simple and generic CAD/CAM approach when implementing AFM probe-based nano-machining for producing two-dimensional (2D) features with a commercial AFM instrument.
dc.language.isoen
dc.publisherLAMDAMAP
dc.rightsPre-print
dc.subjectAFM probe-based machining
dc.subjectCAD/CAM
dc.subjectAutomation
dc.subjectNanomanufacturing
dc.titleA simple and generic CAD/CAM approach for AFM probe-based machining
ensam.embargo.terms2
dc.typdocCommunication avec acte
dc.localisationCentre de Aix en Provence
dc.localisationCentre de Lille
dc.subject.halSciences de l'ingénieur: Micro et nanotechnologies/Microélectronique
ensam.audienceInternationale
ensam.conference.title11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015
ensam.conference.date2015-03-17
ensam.countryRoyaume-Uni
ensam.title.proceeding11th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015
ensam.page362-368
ensam.cityHuddersfield
ensam.peerReviewingNon
ensam.invitedCommunicationNon
ensam.proceedingNon
hal.statusunsent


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