Structural and mechanical properties of Cr–Zr–N coatings with different Zr content

Abstract

Cr–Zr–N films have been synthesised using R.F reactive magnetron sputtering system on Si (100) wafer and XC100 steel substrate without heating. The structural, mechanical and friction coefficient evolution as a function of the Zr content were investigated by XRD, (EDS, WDS), WPS, XPS, SEM, AFM, nanoindentation, Scratch adhesion and pin-on-disc sliding wear tests. The results show, that, with increasing Zr content, the film structure changed with the coexistence of (Cr–N, Zr–N) crystallographic orientation mixture. The films formed a (Cr, Zr) N solid solution where Zr atoms substitute Cr atoms. CrN lattice parameter increased from 4.17 to 4.32 Å with the crystallite size refinement. The mechanical parameters (H, σ, E, H/E and H3/ E2) were significantly improved in comparison to binary films, especially at 29 at.-% Zr. The friction and wear behaviour of the Cr–Zr (29 at.-% Zr)–N coating also showed a significant improvement.