Towards CNC Automation in AFM Probe-Based Nano Machining
dc.contributor.author | BROUSSEAU, Emmanuel |
dc.contributor.author | ARNAL, Benoît |
dc.contributor.author | THIERY, Stéphane |
dc.contributor.author | MAYOR, J.Rhett |
dc.contributor.author
hal.structure.identifier | NYIRI, Eric
|
dc.contributor.author | GIBARU, Olivier |
dc.date.accessioned | 2013 |
dc.date.available | 2013 |
dc.date.issued | 2013 |
dc.date.submitted | 2013 |
dc.identifier.uri | http://hdl.handle.net/10985/7472 |
dc.description.abstract | This paper presents a feasibility study, which aims to demonstrate the applicability of the CNC automation philosophy for the process of AFM probe-based nano machining conducted on commercial AFM instruments. In particular, it is proposed to machine in this way nanostructures generated with any CAD software via the representation of tip path trajectories with G-code instructions. Such a representation can then be interpreted with a post processor at the interface of an AFM instrument. To demonstrate the validity of the proposed approach, it was implemented on a complex pattern. The results obtained open further research perspectives with respect to minimizing the sources of machining errors observed. |
dc.language.iso | en |
dc.publisher | University of Wisconsin-Madison |
dc.rights | Post-print |
dc.subject | AFM probe-based machining |
dc.subject | CAD/CAM |
dc.subject | Automation |
dc.subject | Nanomanufacturing |
dc.title | Towards CNC Automation in AFM Probe-Based Nano Machining |
dc.typdoc | Communication avec acte |
dc.localisation | Centre de Aix en Provence |
dc.subject.hal | Mathématique: Analyse numérique |
dc.subject.hal | Informatique: Ingénierie assistée par ordinateur |
dc.subject.hal | Sciences de l'ingénieur: Micro et nanotechnologies/Microélectronique |
ensam.audience | Internationale |
ensam.conference.title | 8th International Conference on MicroManufacturing (ICOMM 2013) |
ensam.conference.date | 2013-03-25 |
ensam.country | Canada |
ensam.title.proceeding | Proceedings of the 8th International Conference on MicroManufacturing (ICOMM) |
ensam.page | 499-506 |
ensam.issue | Paper N°95 |
hal.identifier | hal-00880967 |
hal.version | 1 |
hal.submission.permitted | updateMetadata |
hal.status | accept |