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dc.contributor.authorBENLATRECHE, Yacine
dc.contributor.author
 hal.structure.identifier
RAHIL, Issam
92851 Université de Constantine
dc.contributor.authorMARCHAL, Rémy
dc.contributor.author
 hal.structure.identifier
CHEKOUR, Lounis
92851 Université de Constantine
dc.contributor.author
 hal.structure.identifier
NOUVEAU, Corinne
127742 Laboratoire Bourguignon des Matériaux et Procédés [LABOMAP]
dc.date.accessioned2013
dc.date.available2015
dc.date.issued2009
dc.date.submitted2013
dc.identifier.issn1612-8850
dc.identifier.urihttp://hdl.handle.net/10985/7632
dc.description.abstractRecently, several studies have shown that the addition of a secondary element likes Al, Si, etc. to nitride and carbide binary systems such as Ti–N and Cr–N improved their structural and mechanical properties and also their thermal stability. In this study, we realized a comparison between the effects of aluminum or molybdenum addition on the properties of the Cr–N system. The (Cr,Al)N and (Cr,Mo)N films were deposited by RF dual magnetron sputtering. To control the aluminum and molybdenum contents in (Cr,Al)N and in (Cr,Mo)N films, respectively, we modified the Cr, Al and Mo target bias. The structural, morphological and composition analyses of the deposited films were carried out using X-ray diffraction (XRD) and SEM equipped with an energy dispersive spectroscopy (EDS) microanalysis. The variation of the residual stresses with the Al and Mo contents has been studied using the Newton’s rings method. The obtained Al contents in (Cr,Al)N deposited films varied between 0 and 51 at.% while the Mo contents in (Cr,Mo)N layers varied between 0 and 42 at.%. A morphological change from amorphous to columnar films has been observed with the addition of Al in the case of (Cr,Al)N coatings, while all the (Cr,Mo)N films presented a columnar structure. The residual stresses of the (Cr,Mo)N coatings are higher than the (Cr,Al)N ones but they exhibited a similar behavior for both coatings.
dc.language.isoen
dc.publisherWiley-VCH Verlag
dc.rightsPost-print
dc.subjectRF magnetron sputtering
dc.subjectCrAlN
dc.subjectCrMoN
dc.subjectMo and Al content influence
dc.subjectphysico-chemical and mechanical properties
dc.subjectMorphology
dc.subjectNitrides
dc.subjectStress
dc.subjectStructure
dc.subjectThin films
dc.titleComparative studies on Mo-Cr-N and Al-Cr-N coatings obtained by PVD dual magnetron sputtering
ensam.embargo.terms2 Years
dc.identifier.doi10.1002/ppap.200930406
dc.typdocArticle dans une revue avec comité de lecture
dc.localisationCentre de Cluny
dc.subject.halPhysique: matière Condensée: Science des matériaux
dc.subject.halSciences de l'ingénieur: Matériaux
dc.subject.halSciences de l'ingénieur: Plasmas
ensam.audienceInternationale
ensam.page135-140
ensam.journalPlasma Processes and Polymers
ensam.volume6
ensam.issueSuppl. 1
hal.statusunsent
dc.identifier.eissn1612-8869


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