Application d'une nouvelle conception d'architecture à une machine de mesure de résolution nanométrique Application of a new architecture design to a measuring machine with a nanometric resolution
| dc.contributor.author
hal.structure.identifier | LAHOUSSE, Ludovic
|
| dc.contributor.author
hal.structure.identifier | DAVID, Jean-Marie
|
| dc.contributor.author
hal.structure.identifier | LELEU, Stéphane
|
| dc.contributor.author | VAILLEAU, Georges-Pierre |
| dc.contributor.author | DUCOURTIEUX, Sébastien |
| dc.date.accessioned | 2014 |
| dc.date.available | 2014 |
| dc.date.issued | 2005 |
| dc.date.submitted | 2014 |
| dc.identifier.issn | 1772-1792 |
| dc.identifier.uri | http://hdl.handle.net/10985/7741 |
| dc.description.abstract | The purpose of this paper is to present original concepts offering an uncertainty control advancement for measuring machines. Those concepts were developed from the analysis of phenomena that reduce the machine accuracy constructed around principles of standard architecture. A machine being developed is a concrete materialization of those concepts. |
| dc.language.iso | fr |
| dc.publisher | Laboratoire national de métrologie et d'essais (LNE) |
| dc.rights | Post-print |
| dc.subject | Nanometrology |
| dc.subject | Metrological loop |
| dc.subject | design of precision measuring machine |
| dc.subject | dissociated metrological structure |
| dc.title | Application d'une nouvelle conception d'architecture à une machine de mesure de résolution nanométrique Application of a new architecture design to a measuring machine with a nanometric resolution |
| dc.typdoc | Article dans une revue avec comité de lecture |
| dc.localisation | Centre de Lille |
| dc.subject.hal | Sciences de l'ingénieur: Mécanique |
| dc.subject.hal | Sciences de l'ingénieur: Mécanique: Génie mécanique |
| ensam.audience | Nationale |
| ensam.page | 35-43 |
| ensam.journal | Revue française de métrologie |
| ensam.volume | 2005-4 |
| hal.identifier | hal-00941291 |
| hal.version | 1 |
| hal.status | accept |
| dc.identifier.eissn | 1776-3215 |
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