Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope
dc.contributor.author | BOUSCAUD, Denis |
dc.contributor.author | PATOOR, Etienne |
dc.contributor.author
hal.structure.identifier | BERVEILLER, Sophie
|
dc.contributor.author | PESCI, Raphaël |
dc.date.accessioned | 2014 |
dc.date.available | 2014 |
dc.date.issued | 2012 |
dc.date.submitted | 2014 |
dc.identifier.issn | 0304-3991 |
dc.identifier.uri | http://hdl.handle.net/10985/7800 |
dc.description | Lien vers la version éditeur: http://www.sciencedirect.com/science/article/pii/S0304399112000307 |
dc.description.abstract | A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Micro-scope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced. |
dc.language.iso | en |
dc.publisher | Elsevier |
dc.rights | Post-print |
dc.subject | Kossel microdiffraction |
dc.subject | Scanning electron microscope |
dc.subject | Lattice parameter |
dc.subject | Specimen heating |
dc.subject | X-rays spatial resolution |
dc.title | Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope |
dc.identifier.doi | 10.1016/j.ultramic.2012.01.018 |
dc.typdoc | Article dans une revue avec comité de lecture |
dc.localisation | Centre de Metz |
dc.subject.hal | Sciences de l'ingénieur: Matériaux |
dc.subject.hal | Sciences de l'ingénieur: Micro et nanotechnologies/Microélectronique |
ensam.audience | Internationale |
ensam.page | 115-119 |
ensam.journal | Ultramicroscopy |
ensam.volume | 115 |
hal.identifier | hal-00951877 |
hal.version | 1 |
hal.submission.permitted | updateFiles |
hal.status | accept |