Show simple item record

dc.contributor.author
 hal.structure.identifier
EL HAYEK, Nadim
178374 Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
dc.contributor.authorNOUIRA, Hichem
dc.contributor.author
 hal.structure.identifier
ANWER, Nabil
6862 École normale supérieure - Cachan [ENS Cachan]
dc.contributor.author
 hal.structure.identifier
DAMAK, Mohamed
178374 Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
dc.contributor.author
 hal.structure.identifier
GIBARU, Olivier
178374 Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
dc.date.accessioned2014
dc.date.available2015
dc.date.issued2014
dc.date.submitted2014
dc.identifier.issn2234-7593
dc.identifier.urihttp://hdl.handle.net/10985/8649
dc.description.abstractBoth contact and non-contact probes are often used in dimensional metrology applications, especially for roughness, form and surface profile measurements. To perform such kind of measurements with a nanometer level of accuracy, LNE (French National Metrology Institute (NMI)) has developed a high precision profilometer traceable to the SI meter definition. The architecture of the machine contains a short and stable metrology frame dissociated from the supporting frame. It perfectly respects Abbe principle. The metrology loop incorporates three Renishaw laser interferometers and is equipped either with a chromatic confocal probe or a tactile probe to achieve measurements at the nanometric level of uncertainty. The machine allows the in-situ calibration of the probes by means of a differential laser interferometer considered as a reference. In this paper, both the architecture and the operation of the LNE’s high precision profilometer are detailed. A brief comparison of the behavior of the chromatic confocal and tactile probes is presented. Optical and tactile scans of an aspherical surface are performed and the large number of data are processed using the L-BFGS (Limited memory-Broyden-Fletcher-Goldfarb-Shanno) algorithm. Fitting results are compared with respect to the evaluated residual errors which reflect the form defects of the surface.
dc.description.sponsorshipEMRP
dc.language.isoen_US
dc.publisherKorean Society of Precision Engineering,
dc.rightsPost-print
dc.subjectAspherical surface
dc.subjectChromatic confocal probe
dc.subjectForm metrology
dc.subjectL-BFGS method
dc.subjectProfilometer
dc.subjectTactile probe
dc.titleComparison of tactile and chromatic confocal measurements of aspherical lenses for form metrology
ensam.hal.submitrunning
ensam.embargo.terms1 Year
dc.identifier.doi10.1007/s12541-014-0405-y
dc.typdocArticle dans une revue avec comité de lecture
dc.localisationCentre de Lille
dc.subject.halSciences de l'ingénieur: Mécanique: Génie mécanique
dc.subject.halSciences de l'ingénieur: Mécanique: Mécanique des matériaux
dc.subject.halSciences de l'ingénieur: Mécanique: Mécanique des solides
ensam.audienceNon spécifiée
ensam.page821-829
ensam.journalInternational Journal of Precision Engineering and Manufacturing
ensam.volume15
ensam.issue5
hal.statusunsent
dc.identifier.eissn2005-4602


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record