Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)
dc.contributor.author
hal.structure.identifier | DEZEST, Denis
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dc.contributor.author
hal.structure.identifier | THOMAS, Olivier
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dc.contributor.author
hal.structure.identifier | MATHIEU, Fabrice
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dc.contributor.author
hal.structure.identifier | MAZENQ, Laurent
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dc.contributor.author
hal.structure.identifier | SOYER, Caroline
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dc.contributor.author
hal.structure.identifier | COSTECALDE, Jean
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dc.contributor.author
hal.structure.identifier | REMIENS, Denis
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dc.contributor.author
hal.structure.identifier | DEÜ, Jean-François
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dc.contributor.author
hal.structure.identifier | NICU, Liviu
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dc.date.accessioned | 2015 |
dc.date.available | 2015 |
dc.date.issued | 2015 |
dc.date.submitted | 2015 |
dc.identifier.issn | 0960-1317 |
dc.identifier.uri | http://hdl.handle.net/10985/9654 |
dc.description.abstract | In this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down approach combining ultraviolet (UV) lithography with other standard planar processing technologies allows us to achieve high-throughput manufacturing. Multilayer stack cantilevers with different geometries have been implemented with measured fundamental resonant frequencies in the megahertz range and Q-factor values ranging from ~130 in air up to ~900 in a vacuum at room temperature. A refined finite element model taking into account the exact configuration of the piezoelectric stack is proposed and demonstrates the importance of considering the dependence of the beam’s cross-section upon the axial coordinate. We extensively investigate both experimentally and theoretically the transduction efficiency of the implemented piezoelectric layer and report for the first time at this integration level a piezoelectric constant of d31 = 15 fm.V−1. Finally, we discuss the current limitations to achieve piezoelectric detection. |
dc.description.sponsorship | ANR/PNANO 2008, project NEMSPIEZO |
dc.language.iso | en |
dc.publisher | IOP Publishing |
dc.rights | Post-print |
dc.subject | NEMS |
dc.subject | Large-scale integration |
dc.subject | PZT |
dc.title | Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT) |
dc.identifier.doi | 10.1088/0960-1317/25/3/035002 |
dc.typdoc | Article dans une revue avec comité de lecture |
dc.localisation | Centre de Lille |
dc.subject.hal | Physique: matière Condensée: Science des matériaux |
dc.subject.hal | Sciences de l'ingénieur: Mécanique |
dc.subject.hal | Sciences de l'ingénieur: Mécanique: Matériaux et structures en mécanique |
dc.subject.hal | Sciences de l'ingénieur: Mécanique: Mécanique des structures |
dc.subject.hal | Sciences de l'ingénieur: Mécanique: Vibrations |
dc.subject.hal | Sciences de l'ingénieur: Micro et nanotechnologies/Microélectronique |
ensam.audience | Internationale |
ensam.page | 35002-35013 |
ensam.journal | Journal of Micromechanics and Microengineering |
ensam.volume | 25 |
ensam.issue | 3 |
hal.identifier | hal-01169283 |
hal.version | 1 |
hal.status | accept |
dc.identifier.eissn | 1361-6439 |