Vickers Microhardness of Oxidized and Nonoxidized Porous Silicon
dc.contributor.author
hal.structure.identifier | RAHMOUN, Khadidja
|
dc.contributor.author
hal.structure.identifier | IOST, Alain
|
dc.contributor.author
hal.structure.identifier | KERYVIN, Vincent
|
dc.contributor.author
hal.structure.identifier | GUILLEMOT, Gildas
|
dc.contributor.author
hal.structure.identifier | SANGLEBOEUF, Jean-Christophe
|
dc.contributor.author | GUENDOUZ, Mohamed |
dc.contributor.author | HAJI, Lazhar |
dc.date.accessioned | 2015 |
dc.date.available | 2015 |
dc.date.issued | 2015 |
dc.date.submitted | 2015 |
dc.identifier.isbn | 978-1-4799-6502-1 |
dc.identifier.uri | http://hdl.handle.net/10985/9703 |
dc.description.abstract | In this work we present our recent investigation on characterizing mechanical properties of porous silicon (PS) by using instrumented micro-indentation. Hardness and elastic modulus for oxidized and nonoxidized PS were measured. Experimental results revealed that hardness and elastic modulus are significantly lower than that of silicon substrate and decrease with increasing porosities. After oxidation an increase of the hardness and elastic modulus were observed. The task of stabilization of PS mechanical parameters can be solved with the help of oxidation. |
dc.language.iso | en |
dc.publisher | IEEE |
dc.rights | Post-print |
dc.subject | Vickers indentation |
dc.subject | Microhardness |
dc.subject | Elastic modulus |
dc.subject | Porous silicon |
dc.subject | Oxidation |
dc.title | Vickers Microhardness of Oxidized and Nonoxidized Porous Silicon |
dc.identifier.doi | 10.1109/NAWDMPV.2014.6997620 |
dc.typdoc | Communication avec acte |
dc.localisation | Centre de Lille |
dc.subject.hal | Sciences de l'ingénieur: Electronique |
dc.subject.hal | Sciences de l'ingénieur: Matériaux |
dc.subject.hal | Sciences de l'ingénieur: Mécanique: Mécanique des matériaux |
ensam.audience | Internationale |
ensam.conference.title | Dielectric Materials for Photovoltaic Systems (NAWDMPV), 2014 North African Workshop on |
ensam.conference.date | 2014-10-26 |
ensam.country | Algérie |
ensam.title.proceeding | Dielectric Materials for Photovoltaic Systems (NAWDMPV), 2014 North African Workshop on |
ensam.page | 1-6 |
ensam.city | Tlemcen |
hal.status | unsent |