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The DSpace digital repository system captures, stores, indexes, preserves, and distributes digital research material.Sat, 28 Jan 2023 07:46:44 GMT2023-01-28T07:46:44ZLNE Activies in Nanometrology: flatness reference calibration algorithm
http://hdl.handle.net/10985/7755
LNE Activies in Nanometrology: flatness reference calibration algorithm
LAHOUSSE, Ludovic; BORIPATKOSOL, Siriwan; LELEU, Stéphane; DAVID, Jean-Marie; DUCOURTIEUX, Sébastien; COOREVITS, Thierry; GIBARU, Olivier
The Laboratoire National de Métrologie et d’Essais (LNE) has developed an innovative ultra precision coordinate measuring machine [LAH07] traceable to the national length standard to measure three-dimensional objects with nanometric uncertainties (figure 1). The measuring range is 300 mm x 300 mm x 50 μm. The objective in term of uncertainty is to reach 30 nm in X and Y directions for a displacement of 300 mm and about few nanometers for a vertical displacement of 50 μm. On this machine, we use four capacitive sensors to measure the position along z direction. These sensors target the flat surface of cylinders (300 mm diameter) used as flatness references. To measure the shape of these aluminum references with nanometric uncertainties, we propose a measurement method based on a propagation process in which we introduce an angular measurement to compensate the curvature error inherent in this method. The measurement process uses the same sensor technology (capacitive sensor) we use on the machine. This paper presents the measurement method, its validation and the first results.
Tue, 01 Jan 2008 00:00:00 GMThttp://hdl.handle.net/10985/77552008-01-01T00:00:00ZLAHOUSSE, LudovicBORIPATKOSOL, SiriwanLELEU, StéphaneDAVID, Jean-MarieDUCOURTIEUX, SébastienCOOREVITS, ThierryGIBARU, OlivierThe Laboratoire National de Métrologie et d’Essais (LNE) has developed an innovative ultra precision coordinate measuring machine [LAH07] traceable to the national length standard to measure three-dimensional objects with nanometric uncertainties (figure 1). The measuring range is 300 mm x 300 mm x 50 μm. The objective in term of uncertainty is to reach 30 nm in X and Y directions for a displacement of 300 mm and about few nanometers for a vertical displacement of 50 μm. On this machine, we use four capacitive sensors to measure the position along z direction. These sensors target the flat surface of cylinders (300 mm diameter) used as flatness references. To measure the shape of these aluminum references with nanometric uncertainties, we propose a measurement method based on a propagation process in which we introduce an angular measurement to compensate the curvature error inherent in this method. The measurement process uses the same sensor technology (capacitive sensor) we use on the machine. This paper presents the measurement method, its validation and the first results.CALIBRATION OF CAPACITIVE SENSORS AND ELECTRONIC LEVELS FOR THE STRAIGHTNESS MEASUREMENTS USING MULTIPROBE METHOD
http://hdl.handle.net/10985/7746
CALIBRATION OF CAPACITIVE SENSORS AND ELECTRONIC LEVELS FOR THE STRAIGHTNESS MEASUREMENTS USING MULTIPROBE METHOD
BORIPATKOSOL, Siriwan; LELEU, Stéphane; COOREVITS, Thierry; GIBARU, Olivier
In this work, the straightness length 300 mm measurement under nanometer uncertainty. The proposed methodology represents a process known as propagation using the assumption of small displacement which leads to solving an overdetermined linear system. The experimental studies were carried out on the capacitive sensors and electronic levels. The least squares mathematic method is apply to calculate the optimal solution. This method requires taking into account the uncertainties of the two different types of sensors leads to method of weighted least squares. The first step is to calibrate the sensors and to estimate the effect on the calculated straightness.
Sat, 01 Jan 2011 00:00:00 GMThttp://hdl.handle.net/10985/77462011-01-01T00:00:00ZBORIPATKOSOL, SiriwanLELEU, StéphaneCOOREVITS, ThierryGIBARU, OlivierIn this work, the straightness length 300 mm measurement under nanometer uncertainty. The proposed methodology represents a process known as propagation using the assumption of small displacement which leads to solving an overdetermined linear system. The experimental studies were carried out on the capacitive sensors and electronic levels. The least squares mathematic method is apply to calculate the optimal solution. This method requires taking into account the uncertainties of the two different types of sensors leads to method of weighted least squares. The first step is to calibrate the sensors and to estimate the effect on the calculated straightness.