https://sam.ensam.eu:443 The DSpace digital repository system captures, stores, indexes, preserves, and distributes digital research material. Wed, 15 Apr 2026 23:21:38 GMT 2026-04-15T23:21:38Z http://hdl.handle.net/10985/7755 LNE Activies in Nanometrology: flatness reference calibration algorithm LAHOUSSE, Ludovic; BORIPATKOSOL, Siriwan; LELEU, Stéphane; DAVID, Jean-Marie; DUCOURTIEUX, Sébastien; COOREVITS, Thierry; GIBARU, Olivier The Laboratoire National de Métrologie et d’Essais (LNE) has developed an innovative ultra precision coordinate measuring machine [LAH07] traceable to the national length standard to measure three-dimensional objects with nanometric uncertainties (figure 1). The measuring range is 300 mm x 300 mm x 50 μm. The objective in term of uncertainty is to reach 30 nm in X and Y directions for a displacement of 300 mm and about few nanometers for a vertical displacement of 50 μm. On this machine, we use four capacitive sensors to measure the position along z direction. These sensors target the flat surface of cylinders (300 mm diameter) used as flatness references. To measure the shape of these aluminum references with nanometric uncertainties, we propose a measurement method based on a propagation process in which we introduce an angular measurement to compensate the curvature error inherent in this method. The measurement process uses the same sensor technology (capacitive sensor) we use on the machine. This paper presents the measurement method, its validation and the first results. Tue, 01 Jan 2008 00:00:00 GMT http://hdl.handle.net/10985/7755 2008-01-01T00:00:00Z LAHOUSSE, Ludovic BORIPATKOSOL, Siriwan LELEU, Stéphane DAVID, Jean-Marie DUCOURTIEUX, Sébastien COOREVITS, Thierry GIBARU, Olivier The Laboratoire National de Métrologie et d’Essais (LNE) has developed an innovative ultra precision coordinate measuring machine [LAH07] traceable to the national length standard to measure three-dimensional objects with nanometric uncertainties (figure 1). The measuring range is 300 mm x 300 mm x 50 μm. The objective in term of uncertainty is to reach 30 nm in X and Y directions for a displacement of 300 mm and about few nanometers for a vertical displacement of 50 μm. On this machine, we use four capacitive sensors to measure the position along z direction. These sensors target the flat surface of cylinders (300 mm diameter) used as flatness references. To measure the shape of these aluminum references with nanometric uncertainties, we propose a measurement method based on a propagation process in which we introduce an angular measurement to compensate the curvature error inherent in this method. The measurement process uses the same sensor technology (capacitive sensor) we use on the machine. This paper presents the measurement method, its validation and the first results. http://hdl.handle.net/10985/6354 Création d’un « étalon métrologique » d’une roue dentée sur Machine à Mesurer Tridimensionnelle DAVID, Jean-Marie; LELEU, Stéphane; BAUDOUIN, Cyrille; GIBARU, Olivier La problématique de mesure de pièces complexes, présentant des formes symétriques suivant un axe de rotation telles que les roues dentées par exemple, avec de faibles incertitudes de mesures est exposée. La création d’un étalon de très grande qualité métrologique, à partir d’une pièce physique issue de la production, est présentée avec la mise en oeuvre d’une technique d’élimination d’erreurs par multi–retournement sous Machine à Mesurer Tridimensionnelle. L’objet du présent article est de décrire le processus d’élimination d’erreurs et de moyennage qui permet d’obtenir certaines caractéristiques de la pièce avec un niveau d’incertitudes très faibles. Cette analyse est effectuée théoriquement et confirmée par simulation numérique. Les résultats expérimentaux de la qualification d’un pignon conique de différentiel automobile par cette technique confirment son statut d’étalon métrologique avec un très faible niveau d’incertitudes, en particulier pour l’erreur de pas. The issue of the measurement of elaborate parts displaying symmetrical shapes along a rotation axis with low measurement deviations such as gears is addressed. The creation of a very high metrological quality measurement standard made from a manufactured physical part is exposed with the implementation of an error elimination method of tooth by tooth rotation on a Coordinate Measuring Machine. The purpose of this article is to describe the error elimination and averaging process enabling the acquiring of some characteristics of the part with a very low deviation level. This analysis is realised theoretically and confirmed with numerical simulation. Experimental results of the qualification of an automobile differential bevel gear with this technique confirm its very low deviation level measurement standard status, particularly for pitch error. Mon, 01 Jan 2007 00:00:00 GMT http://hdl.handle.net/10985/6354 2007-01-01T00:00:00Z DAVID, Jean-Marie LELEU, Stéphane BAUDOUIN, Cyrille GIBARU, Olivier La problématique de mesure de pièces complexes, présentant des formes symétriques suivant un axe de rotation telles que les roues dentées par exemple, avec de faibles incertitudes de mesures est exposée. La création d’un étalon de très grande qualité métrologique, à partir d’une pièce physique issue de la production, est présentée avec la mise en oeuvre d’une technique d’élimination d’erreurs par multi–retournement sous Machine à Mesurer Tridimensionnelle. L’objet du présent article est de décrire le processus d’élimination d’erreurs et de moyennage qui permet d’obtenir certaines caractéristiques de la pièce avec un niveau d’incertitudes très faibles. Cette analyse est effectuée théoriquement et confirmée par simulation numérique. Les résultats expérimentaux de la qualification d’un pignon conique de différentiel automobile par cette technique confirment son statut d’étalon métrologique avec un très faible niveau d’incertitudes, en particulier pour l’erreur de pas. The issue of the measurement of elaborate parts displaying symmetrical shapes along a rotation axis with low measurement deviations such as gears is addressed. The creation of a very high metrological quality measurement standard made from a manufactured physical part is exposed with the implementation of an error elimination method of tooth by tooth rotation on a Coordinate Measuring Machine. The purpose of this article is to describe the error elimination and averaging process enabling the acquiring of some characteristics of the part with a very low deviation level. This analysis is realised theoretically and confirmed with numerical simulation. Experimental results of the qualification of an automobile differential bevel gear with this technique confirm its very low deviation level measurement standard status, particularly for pitch error. http://hdl.handle.net/10985/8946 A newly conceived cylinder measuring machine and methods that eliminate the spindle errors VISSIERE, Alain; NOUIRA, Hichem; DAMAK, Mohamed; GIBARU, Olivier; DAVID, Jean-Marie Advanced manufacturing processes require improving dimensional metrology applications to reach a nanometric accuracy level. Such measurements may be carried out using conventional highly accurate roundness measuring machines. On these machines, the metrology loop goes through the probing and the mechanical guiding elements. Hence, external forces, strain and thermal expansion are transmitted to the metrological structure through the supporting structure, thereby reducing measurement quality. The obtained measurement also combines both the motion error of the guiding system and the form error of the artifact. Detailed uncertainty budgeting might be improved, using error separation methods (multi-step, reversal and multi-probe error separation methods, etc), enabling identification of the systematic (synchronous or repeatable) guiding system motion errors as well as form error of the artifact. Nevertheless, the performance of this kind of machine is limited by the repeatability level of the mechanical guiding elements, which usually exceeds 25 nm (in the case of an air bearing spindle and a linear bearing). In order to guarantee a 5 nm measurement uncertainty level, LNE is currently developing an original machine dedicated to form measurement on cylindrical and spherical artifacts with an ultra-high level of accuracy. The architecture of this machine is based on the ‘dissociated metrological technique’ principle and contains reference probes and cylinder. The form errors of both cylindrical artifact and reference cylinder are obtained after a mathematical combination between the information given by the probe sensing the artifact and the information given by the probe sensing the reference cylinder by applying the modified multi-step separation method. Sun, 01 Jan 2012 00:00:00 GMT http://hdl.handle.net/10985/8946 2012-01-01T00:00:00Z VISSIERE, Alain NOUIRA, Hichem DAMAK, Mohamed GIBARU, Olivier DAVID, Jean-Marie Advanced manufacturing processes require improving dimensional metrology applications to reach a nanometric accuracy level. Such measurements may be carried out using conventional highly accurate roundness measuring machines. On these machines, the metrology loop goes through the probing and the mechanical guiding elements. Hence, external forces, strain and thermal expansion are transmitted to the metrological structure through the supporting structure, thereby reducing measurement quality. The obtained measurement also combines both the motion error of the guiding system and the form error of the artifact. Detailed uncertainty budgeting might be improved, using error separation methods (multi-step, reversal and multi-probe error separation methods, etc), enabling identification of the systematic (synchronous or repeatable) guiding system motion errors as well as form error of the artifact. Nevertheless, the performance of this kind of machine is limited by the repeatability level of the mechanical guiding elements, which usually exceeds 25 nm (in the case of an air bearing spindle and a linear bearing). In order to guarantee a 5 nm measurement uncertainty level, LNE is currently developing an original machine dedicated to form measurement on cylindrical and spherical artifacts with an ultra-high level of accuracy. The architecture of this machine is based on the ‘dissociated metrological technique’ principle and contains reference probes and cylinder. The form errors of both cylindrical artifact and reference cylinder are obtained after a mathematical combination between the information given by the probe sensing the artifact and the information given by the probe sensing the reference cylinder by applying the modified multi-step separation method. http://hdl.handle.net/10985/8944 Concept and architecture of a new apparatus for cylindrical form measurement with a nanometric level of accuracy VISSIERE, Alain; NOUIRA, Hichem; DAMAK, Mohamed; GIBARU, Olivier; DAVID, Jean-Marie In relation to the industrial need and to the progress of technology, Laboratoire National de M´etrologie et d’Essais (LNE) would like to improve the measurement of its primary pressure standards, spherical and flick standards. The spherical and flick standards are, respectively, used to calibrate the spindle motion error and the probe, which equip commercial conventional cylindricity-measuring machines. The primary pressure standards are obtained using pressure balances equipped with rotary pistons. To reach a relative uncertainty of 10−6 in the pressure measurement, it is necessary to know the diameters of both the piston and the cylinder with an uncertainty of 5 nm for a piston diameter of 10 mm. Conventional machines are not able to reach such an uncertainty level. That is why the development of a new machine is necessary. The purpose of this paper is to present the concepts and the architecture adopted in the development of the new equipment dedicated to cylindricity measurement at a nanometric level of a accuracy. The choice of these concepts is based on the analysis of the uncertainty sources encountered in conventional architectures. The architecture of the new ultra-high equipment as well as the associated calibration procedures will be described and detailed. Sun, 01 Jan 2012 00:00:00 GMT http://hdl.handle.net/10985/8944 2012-01-01T00:00:00Z VISSIERE, Alain NOUIRA, Hichem DAMAK, Mohamed GIBARU, Olivier DAVID, Jean-Marie In relation to the industrial need and to the progress of technology, Laboratoire National de M´etrologie et d’Essais (LNE) would like to improve the measurement of its primary pressure standards, spherical and flick standards. The spherical and flick standards are, respectively, used to calibrate the spindle motion error and the probe, which equip commercial conventional cylindricity-measuring machines. The primary pressure standards are obtained using pressure balances equipped with rotary pistons. To reach a relative uncertainty of 10−6 in the pressure measurement, it is necessary to know the diameters of both the piston and the cylinder with an uncertainty of 5 nm for a piston diameter of 10 mm. Conventional machines are not able to reach such an uncertainty level. That is why the development of a new machine is necessary. The purpose of this paper is to present the concepts and the architecture adopted in the development of the new equipment dedicated to cylindricity measurement at a nanometric level of a accuracy. The choice of these concepts is based on the analysis of the uncertainty sources encountered in conventional architectures. The architecture of the new ultra-high equipment as well as the associated calibration procedures will be described and detailed. http://hdl.handle.net/10985/7756 La mesure des angles au BNM-LNE : création d'une nouvelle référence de mesure angulaire LELEU, Stéphane; DAVID, Jean-Marie; VAILLEAU, Georges-Pierre The object of this article is to present the angular reference plate developed by the BNM-LNE. After having presented the angular standards we draw the purposes to reach for an angular reference instrument. The principle of two encoders' errors elimination is presented with the solution carried out to free itself from under sampling defaults inherent to this measuring principle. Presentation of the assessment of uncertainties and its result of a standard uncertainty of ± 0.04" for the measurement of angular polygons are validated by the participation at the comparative survey EUROMET 371 Wed, 01 Jan 2003 00:00:00 GMT http://hdl.handle.net/10985/7756 2003-01-01T00:00:00Z LELEU, Stéphane DAVID, Jean-Marie VAILLEAU, Georges-Pierre The object of this article is to present the angular reference plate developed by the BNM-LNE. After having presented the angular standards we draw the purposes to reach for an angular reference instrument. The principle of two encoders' errors elimination is presented with the solution carried out to free itself from under sampling defaults inherent to this measuring principle. Presentation of the assessment of uncertainties and its result of a standard uncertainty of ± 0.04" for the measurement of angular polygons are validated by the participation at the comparative survey EUROMET 371 http://hdl.handle.net/10985/7741 Application d'une nouvelle conception d'architecture à une machine de mesure de résolution nanométrique Application of a new architecture design to a measuring machine with a nanometric resolution LAHOUSSE, Ludovic; DAVID, Jean-Marie; LELEU, Stéphane; VAILLEAU, Georges-Pierre; DUCOURTIEUX, Sébastien The purpose of this paper is to present original concepts offering an uncertainty control advancement for measuring machines. Those concepts were developed from the analysis of phenomena that reduce the machine accuracy constructed around principles of standard architecture. A machine being developed is a concrete materialization of those concepts. Sat, 01 Jan 2005 00:00:00 GMT http://hdl.handle.net/10985/7741 2005-01-01T00:00:00Z LAHOUSSE, Ludovic DAVID, Jean-Marie LELEU, Stéphane VAILLEAU, Georges-Pierre DUCOURTIEUX, Sébastien The purpose of this paper is to present original concepts offering an uncertainty control advancement for measuring machines. Those concepts were developed from the analysis of phenomena that reduce the machine accuracy constructed around principles of standard architecture. A machine being developed is a concrete materialization of those concepts. http://hdl.handle.net/10985/7754 Z calibration of the LNE ultra precision coordinate measuring machine LAHOUSSE, Ludovic; LELEU, Stéphane; DAVID, Jean-Marie; DUCOURTIEUX, Sébastien; GIBARU, Olivier The Laboratoire National de Métrologie et d’Essais (LNE) has developed an innovative ultra precision coordinate measuring machine [1,2] traceable to the national length standard. This machine can be equipped with different kinds of sensors and is dedicated to the measurement with nanometer uncertainties of features, standards and in more general way three-dimensional objects. The measuring range is 300 mm x 300 mm x 50 μm. The objective in term of uncertainty is to reach 30 nm in X and Y directions for a 300 mm displacement and about few nanometers for the 50 μm vertical displacement. For the geometric calibration of this machine, dedicated procedures have been developed. The present paper will focus more specifically on the one used for the Z calibration. Mon, 01 Jan 2007 00:00:00 GMT http://hdl.handle.net/10985/7754 2007-01-01T00:00:00Z LAHOUSSE, Ludovic LELEU, Stéphane DAVID, Jean-Marie DUCOURTIEUX, Sébastien GIBARU, Olivier The Laboratoire National de Métrologie et d’Essais (LNE) has developed an innovative ultra precision coordinate measuring machine [1,2] traceable to the national length standard. This machine can be equipped with different kinds of sensors and is dedicated to the measurement with nanometer uncertainties of features, standards and in more general way three-dimensional objects. The measuring range is 300 mm x 300 mm x 50 μm. The objective in term of uncertainty is to reach 30 nm in X and Y directions for a 300 mm displacement and about few nanometers for the 50 μm vertical displacement. For the geometric calibration of this machine, dedicated procedures have been developed. The present paper will focus more specifically on the one used for the Z calibration.