https://sam.ensam.eu:443 The DSpace digital repository system captures, stores, indexes, preserves, and distributes digital research material. Fri, 05 Jun 2026 22:12:01 GMT 2026-06-05T22:12:01Z http://hdl.handle.net/10985/9703 Vickers Microhardness of Oxidized and Nonoxidized Porous Silicon RAHMOUN, Khadidja; IOST, Alain; KERYVIN, Vincent; GUILLEMOT, Gildas; SANGLEBOEUF, Jean-Christophe; GUENDOUZ, Mohamed; HAJI, Lazhar In this work we present our recent investigation on characterizing mechanical properties of porous silicon (PS) by using instrumented micro-indentation. Hardness and elastic modulus for oxidized and nonoxidized PS were measured. Experimental results revealed that hardness and elastic modulus are significantly lower than that of silicon substrate and decrease with increasing porosities. After oxidation an increase of the hardness and elastic modulus were observed. The task of stabilization of PS mechanical parameters can be solved with the help of oxidation. Thu, 01 Jan 2015 00:00:00 GMT http://hdl.handle.net/10985/9703 2015-01-01T00:00:00Z RAHMOUN, Khadidja IOST, Alain KERYVIN, Vincent GUILLEMOT, Gildas SANGLEBOEUF, Jean-Christophe GUENDOUZ, Mohamed HAJI, Lazhar In this work we present our recent investigation on characterizing mechanical properties of porous silicon (PS) by using instrumented micro-indentation. Hardness and elastic modulus for oxidized and nonoxidized PS were measured. Experimental results revealed that hardness and elastic modulus are significantly lower than that of silicon substrate and decrease with increasing porosities. After oxidation an increase of the hardness and elastic modulus were observed. The task of stabilization of PS mechanical parameters can be solved with the help of oxidation.