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The DSpace digital repository system captures, stores, indexes, preserves, and distributes digital research material.Fri, 19 Jul 2024 01:46:22 GMT2024-07-19T01:46:22ZWafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)
http://hdl.handle.net/10985/9654
Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)
DEZEST, Denis; THOMAS, Olivier; MATHIEU, Fabrice; MAZENQ, Laurent; SOYER, Caroline; COSTECALDE, Jean; REMIENS, Denis; DEÜ, Jean-François; NICU, Liviu
In this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down approach combining ultraviolet (UV) lithography with other standard planar processing technologies allows us to achieve high-throughput manufacturing. Multilayer stack cantilevers with different geometries have been implemented with measured fundamental resonant frequencies in the megahertz range and Q-factor values ranging from ~130 in air up to ~900 in a vacuum at room temperature. A refined finite element model taking into account the exact configuration of the piezoelectric stack is proposed and demonstrates the importance of considering the dependence of the beam’s cross-section upon the axial coordinate. We extensively investigate both experimentally and theoretically the transduction efficiency of the implemented piezoelectric layer and report for the first time at this integration level a piezoelectric constant of d31 = 15 fm.V−1. Finally, we discuss the current limitations to achieve piezoelectric detection.
Thu, 01 Jan 2015 00:00:00 GMThttp://hdl.handle.net/10985/96542015-01-01T00:00:00ZDEZEST, DenisTHOMAS, OlivierMATHIEU, FabriceMAZENQ, LaurentSOYER, CarolineCOSTECALDE, JeanREMIENS, DenisDEÜ, Jean-FrançoisNICU, LiviuIn this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down approach combining ultraviolet (UV) lithography with other standard planar processing technologies allows us to achieve high-throughput manufacturing. Multilayer stack cantilevers with different geometries have been implemented with measured fundamental resonant frequencies in the megahertz range and Q-factor values ranging from ~130 in air up to ~900 in a vacuum at room temperature. A refined finite element model taking into account the exact configuration of the piezoelectric stack is proposed and demonstrates the importance of considering the dependence of the beam’s cross-section upon the axial coordinate. We extensively investigate both experimentally and theoretically the transduction efficiency of the implemented piezoelectric layer and report for the first time at this integration level a piezoelectric constant of d31 = 15 fm.V−1. Finally, we discuss the current limitations to achieve piezoelectric detection.PZT Nanofilm-Based Wafer Scale Nanoresonators
http://hdl.handle.net/10985/10206
PZT Nanofilm-Based Wafer Scale Nanoresonators
DEZEST, Denis; MATHIEU, Fabrice; MAZENQ, Laurent; SOYER, Caroline; COSTECALDE, Jean; THOMAS, Olivier; REMIENS, Denis
In this work, we present an unprecedented level of integration of piezoelectric actuation means on arrays of functional nanoresonators at the wafer scale. We use 150-nm thin lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scale. This work paves promising ways for NEMS to be used in configurations where transduction capabilities are integrated at the nanodevice level providing effective fabrication process flow at the wafer-scale.
Thu, 01 Jan 2015 00:00:00 GMThttp://hdl.handle.net/10985/102062015-01-01T00:00:00ZDEZEST, DenisMATHIEU, FabriceMAZENQ, LaurentSOYER, CarolineCOSTECALDE, JeanTHOMAS, OlivierREMIENS, DenisIn this work, we present an unprecedented level of integration of piezoelectric actuation means on arrays of functional nanoresonators at the wafer scale. We use 150-nm thin lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scale. This work paves promising ways for NEMS to be used in configurations where transduction capabilities are integrated at the nanodevice level providing effective fabrication process flow at the wafer-scale.Piezoelectric amplifiers with integrated actuation and sensing capabilities
http://hdl.handle.net/10985/10105
Piezoelectric amplifiers with integrated actuation and sensing capabilities
THOMAS, Olivier; MATHIEU, Fabrice; MANSFIELD, W.; HUANG, C.; TROLIER MCKINSTRY, Susan; NICU, Liviu
We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.
Tue, 01 Jan 2013 00:00:00 GMThttp://hdl.handle.net/10985/101052013-01-01T00:00:00ZTHOMAS, OlivierMATHIEU, FabriceMANSFIELD, W.HUANG, C.TROLIER MCKINSTRY, SusanNICU, LiviuWe report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.Improved resistive shunt by means of negative capacitance: new circuit, performances and multi-mode control
http://hdl.handle.net/10985/11320
Improved resistive shunt by means of negative capacitance: new circuit, performances and multi-mode control
BERARDENGO, Marta; THOMAS, Olivier; MANZONI, Stefano; GIRAUD-AUDINE, Christophe
This paper deals with vibration control by means of piezoelectric patches shunted with electrical impedances made up by a resistance and a negative capacitance. The paper analyses most of the possible layouts by which a negative capacitance can be built and shows that a common mathematical description is possible. This allows closed formulations to be found in order to optimise the electrical network for mono- and multi-mode control. General analytical formulations are obtained to estimate the performance of the shunt in terms of vibration reduction. In particular, it is highlighted that the main effect of a negative capacitance is to artificially enhance the electromechanical coupling factor, which is the basis of performance estimation. Stability issues relating to the use of negative capacitances are especially addressed using refined models for the piezoelectric patch capacitance. Furthermore, a new circuit based on a couple of negative capacitances is proposed and tested, showing better performances than those provided by the usual layouts with a single negative capacitance. Finally, guidelines and analytical formulations to deal with the practical implementation of negative capacitance circuits are provided.
Fri, 01 Jan 2016 00:00:00 GMThttp://hdl.handle.net/10985/113202016-01-01T00:00:00ZBERARDENGO, MartaTHOMAS, OlivierMANZONI, StefanoGIRAUD-AUDINE, ChristopheThis paper deals with vibration control by means of piezoelectric patches shunted with electrical impedances made up by a resistance and a negative capacitance. The paper analyses most of the possible layouts by which a negative capacitance can be built and shows that a common mathematical description is possible. This allows closed formulations to be found in order to optimise the electrical network for mono- and multi-mode control. General analytical formulations are obtained to estimate the performance of the shunt in terms of vibration reduction. In particular, it is highlighted that the main effect of a negative capacitance is to artificially enhance the electromechanical coupling factor, which is the basis of performance estimation. Stability issues relating to the use of negative capacitances are especially addressed using refined models for the piezoelectric patch capacitance. Furthermore, a new circuit based on a couple of negative capacitances is proposed and tested, showing better performances than those provided by the usual layouts with a single negative capacitance. Finally, guidelines and analytical formulations to deal with the practical implementation of negative capacitance circuits are provided.An upper bound for validity limits of asymptotic analytical approaches based on normal form theory
http://hdl.handle.net/10985/7473
An upper bound for validity limits of asymptotic analytical approaches based on normal form theory
LAMARQUE, Claude-Henri; TOUZÉ, Cyril; THOMAS, Olivier
Perturbation methods are routinely used in all fields of applied mathematics where analytical solutions for nonlinear dynamical systems are searched. Among them, normal form theory provides a reliable method for systematically simplifying dynamical systems via nonlinear change of coordinates, and is also used in a mechanical context to define Nonlinear Normal Modes (NNMs). The main recognized drawback of perturbation methods is the absence of a criterion establishing their range of validity in terms of amplitude. In this paper, we propose a method to obtain upper bounds for amplitudes of changes of variables in normal form transformations. The criterion is tested on simple mechanical systems with one and two degrees-of-freedom, and for complex as well as real normal form. Its behavior with increasing order in the normal transform is established, and comparisons are drawn between exact solutions and normal form computations for increasing levels of amplitudes. The results clearly establish that the criterion gives an upper bound for validity limit of normal transforms.
Sun, 01 Jan 2012 00:00:00 GMThttp://hdl.handle.net/10985/74732012-01-01T00:00:00ZLAMARQUE, Claude-HenriTOUZÉ, CyrilTHOMAS, OlivierPerturbation methods are routinely used in all fields of applied mathematics where analytical solutions for nonlinear dynamical systems are searched. Among them, normal form theory provides a reliable method for systematically simplifying dynamical systems via nonlinear change of coordinates, and is also used in a mechanical context to define Nonlinear Normal Modes (NNMs). The main recognized drawback of perturbation methods is the absence of a criterion establishing their range of validity in terms of amplitude. In this paper, we propose a method to obtain upper bounds for amplitudes of changes of variables in normal form transformations. The criterion is tested on simple mechanical systems with one and two degrees-of-freedom, and for complex as well as real normal form. Its behavior with increasing order in the normal transform is established, and comparisons are drawn between exact solutions and normal form computations for increasing levels of amplitudes. The results clearly establish that the criterion gives an upper bound for validity limit of normal transforms.Efficient parametric amplification in micro-resonators with integrated piezoelectric actuation and sensing capabilities
http://hdl.handle.net/10985/8827
Efficient parametric amplification in micro-resonators with integrated piezoelectric actuation and sensing capabilities
THOMAS, Olivier; FABRICE, Mathieu; MANSFIELD, W.; HUANG, C.; TROLIER MCKINSTRY, Susan; NICU, Liviu
We report, in this work, on unprecedented levels of parametric amplification in microelectromechanical resonators, operated in air, with integrated piezoelectric actuation and sensing capabilities. The method relies on an analytical/numerical understanding of the influence of geometrical nonlinearities inherent to the bridge-like configuration of the resonators. We provide analytical formulae to predict the performances of the parametric amplifier below the nonlinearity threshold, in terms of gain and quality factor (Q) enhancement. The analysis explains how to overcome this nonlinearity threshold by controlling the drive signals. It predicts that in theory, any Q-factor enhancement can be achieved. Experimental validation demonstrates a Q-factor enhancement by up to a factor 14 in air.
Tue, 01 Jan 2013 00:00:00 GMThttp://hdl.handle.net/10985/88272013-01-01T00:00:00ZTHOMAS, OlivierFABRICE, MathieuMANSFIELD, W.HUANG, C.TROLIER MCKINSTRY, SusanNICU, LiviuWe report, in this work, on unprecedented levels of parametric amplification in microelectromechanical resonators, operated in air, with integrated piezoelectric actuation and sensing capabilities. The method relies on an analytical/numerical understanding of the influence of geometrical nonlinearities inherent to the bridge-like configuration of the resonators. We provide analytical formulae to predict the performances of the parametric amplifier below the nonlinearity threshold, in terms of gain and quality factor (Q) enhancement. The analysis explains how to overcome this nonlinearity threshold by controlling the drive signals. It predicts that in theory, any Q-factor enhancement can be achieved. Experimental validation demonstrates a Q-factor enhancement by up to a factor 14 in air.A new electrical circuit with negative capacitances to enhance resistive shunt damping
http://hdl.handle.net/10985/9985
A new electrical circuit with negative capacitances to enhance resistive shunt damping
BERARDENGO, Marta; MANZONI, Stefano; THOMAS, Olivier; GIRAUD-AUDINE, Christophe
This article proposes a new layout of electrical network based on two negative capacitance circuits, aimed at increasing the performances of a traditional resistive piezoelectric shunt for structural vibration reduction. It is equivalent to artificially increase the modal electromechanical coupling factor of the electromechanical structure by both decreasing the short-circuit natural frequencies and increasing the open-circuit ones. This leads to higher values of the modal electromechanical coupling factor with respect to simple negative capacitance configurations, when the same margin from stability is considered. This technique is shown to be powerful in enhancing the control performance when associated to a simple resistive shunt, usually avoided because of its poor performances.
Thu, 01 Jan 2015 00:00:00 GMThttp://hdl.handle.net/10985/99852015-01-01T00:00:00ZBERARDENGO, MartaMANZONI, StefanoTHOMAS, OlivierGIRAUD-AUDINE, ChristopheThis article proposes a new layout of electrical network based on two negative capacitance circuits, aimed at increasing the performances of a traditional resistive piezoelectric shunt for structural vibration reduction. It is equivalent to artificially increase the modal electromechanical coupling factor of the electromechanical structure by both decreasing the short-circuit natural frequencies and increasing the open-circuit ones. This leads to higher values of the modal electromechanical coupling factor with respect to simple negative capacitance configurations, when the same margin from stability is considered. This technique is shown to be powerful in enhancing the control performance when associated to a simple resistive shunt, usually avoided because of its poor performances.Nonlinear vibrations of steelpans: analysis of mode coupling in view of modal sound synthesis.
http://hdl.handle.net/10985/10115
Nonlinear vibrations of steelpans: analysis of mode coupling in view of modal sound synthesis.
MONTEIL, Mélodie; TOUZÉ, Cyril; THOMAS, Olivier
Steelpans are musical percussions made from steel barrels. During the manufacturing, the metal is stretched and bended, to produce a set of thin shells that are the differents notes of the instrument. In normal playing, each note is struck, and the sound reveals some nonlinear characteristics which give its peculiar tone to the instrument. In this paper, an experimental approach is first presented in order to show the complex dynamics existing in steelpan’s vibrations. Then two models, based on typical modal interactions, are proposed to quantify these nonlinearities. Finally, one of them is observed in free oscillations simulations, in order to compare the internal resonance model to the steelpan vibrations behaviour in normal playing. The aim is to identify the important modes participating in the vibrations in view of building reduced-order models for modal sound synthesis.
Tue, 01 Jan 2013 00:00:00 GMThttp://hdl.handle.net/10985/101152013-01-01T00:00:00ZMONTEIL, MélodieTOUZÉ, CyrilTHOMAS, OlivierSteelpans are musical percussions made from steel barrels. During the manufacturing, the metal is stretched and bended, to produce a set of thin shells that are the differents notes of the instrument. In normal playing, each note is struck, and the sound reveals some nonlinear characteristics which give its peculiar tone to the instrument. In this paper, an experimental approach is first presented in order to show the complex dynamics existing in steelpan’s vibrations. Then two models, based on typical modal interactions, are proposed to quantify these nonlinearities. Finally, one of them is observed in free oscillations simulations, in order to compare the internal resonance model to the steelpan vibrations behaviour in normal playing. The aim is to identify the important modes participating in the vibrations in view of building reduced-order models for modal sound synthesis.Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators
http://hdl.handle.net/10985/10119
Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators
DEZEST, Denis; MATHIEU, Fabrice; MAZENQ, Laurent; SOYER, Caroline; COSTECALDE, Jean; REMIENS, Denis; THOMAS, Olivier; DEÜ, Jean-François; NICU, Liviu
In this work, we demonstrate the integration of piezoelectric actuation means on arrays of nanocantilevers at the wafer scale. We use lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scale
Tue, 01 Jan 2013 00:00:00 GMThttp://hdl.handle.net/10985/101192013-01-01T00:00:00ZDEZEST, DenisMATHIEU, FabriceMAZENQ, LaurentSOYER, CarolineCOSTECALDE, JeanREMIENS, DenisTHOMAS, OlivierDEÜ, Jean-FrançoisNICU, LiviuIn this work, we demonstrate the integration of piezoelectric actuation means on arrays of nanocantilevers at the wafer scale. We use lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scaleNonlinear forced vibrations of thin structures with tuned eigenfrequencies: the cases of 1:2:4 and 1:2:2 internal resonances
http://hdl.handle.net/10985/8952
Nonlinear forced vibrations of thin structures with tuned eigenfrequencies: the cases of 1:2:4 and 1:2:2 internal resonances
MONTEIL, Mélodie; TOUZÉ, Cyril; THOMAS, Olivier; BENACCHIO, Simon
This paper is devoted to the analysis of nonlinear forced vibrations of two particular three degrees-of-freedom (dofs) systems exhibiting second order internal resonances resulting from a harmonic tuning of their natural frequencies. The first model considers three modes with eigenfrequencies ω1, ω2, and ω3 such that ω3 = 2ω2 = 4ω1, thus displaying a 1:2:4 internal resonance. The second system exhibits a 1:2:2 internal resonance, so that the frequency relationship reads ω3 ω2 2ω1. Multiple scales method is used to solve analytically the forced oscillations for the two models excited on each degree of freedom at primary resonance. A thorough analytical study is proposed, with a particular emphasis on the stability of the solutions. Parametric investigations allow to get a complete picture of the dynamics of the two systems. Results are systematically compared to the classical 1:2 resonance, in order to understand how the presence of a third oscillator modifies the nonlinear dynamics
Wed, 01 Jan 2014 00:00:00 GMThttp://hdl.handle.net/10985/89522014-01-01T00:00:00ZMONTEIL, MélodieTOUZÉ, CyrilTHOMAS, OlivierBENACCHIO, SimonThis paper is devoted to the analysis of nonlinear forced vibrations of two particular three degrees-of-freedom (dofs) systems exhibiting second order internal resonances resulting from a harmonic tuning of their natural frequencies. The first model considers three modes with eigenfrequencies ω1, ω2, and ω3 such that ω3 = 2ω2 = 4ω1, thus displaying a 1:2:4 internal resonance. The second system exhibits a 1:2:2 internal resonance, so that the frequency relationship reads ω3 ω2 2ω1. Multiple scales method is used to solve analytically the forced oscillations for the two models excited on each degree of freedom at primary resonance. A thorough analytical study is proposed, with a particular emphasis on the stability of the solutions. Parametric investigations allow to get a complete picture of the dynamics of the two systems. Results are systematically compared to the classical 1:2 resonance, in order to understand how the presence of a third oscillator modifies the nonlinear dynamics