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 hal.structure.identifier
BOUSCAUD, Denis
178323 Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux [LEM3]
dc.contributor.author
 hal.structure.identifier
PESCI, Raphaël
178323 Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux [LEM3]
dc.contributor.author
 hal.structure.identifier
BERVEILLER, Sophie
178323 Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux [LEM3]
dc.contributor.author
 hal.structure.identifier
PATOOR, Etienne
178323 Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux [LEM3]
dc.date.accessioned2014
dc.date.available2014
dc.date.issued2012
dc.date.submitted2014
dc.identifier.issn0304-3991
dc.identifier.urihttp://hdl.handle.net/10985/7800
dc.descriptionLien vers la version éditeur: http://www.sciencedirect.com/science/article/pii/S0304399112000307
dc.description.abstractA Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Micro-scope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced.
dc.language.isoen
dc.publisherElsevier
dc.rightsPost-print
dc.subjectKossel microdiffraction
dc.subjectScanning electron microscope
dc.subjectLattice parameter
dc.subjectSpecimen heating
dc.subjectX-rays spatial resolution
dc.titleEstimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope
dc.identifier.doi10.1016/j.ultramic.2012.01.018
dc.typdocArticles dans des revues avec comité de lecture
dc.localisationCentre de Metz
dc.subject.halSciences de l'ingénieur: Matériaux
dc.subject.halSciences de l'ingénieur: Micro et nanotechnologies/Microélectronique
ensam.audienceInternationale
ensam.page115-119
ensam.journalUltramicroscopy
ensam.volume115
hal.identifierhal-00951877
hal.version1
hal.submission.permittedupdateFiles


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