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 hal.structure.identifier
DEZEST, Denis
459 Laboratoire d'analyse et d'architecture des systèmes [Toulouse] [LAAS]
dc.contributor.author
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THOMAS, Olivier
12568 Laboratoire de Mécanique des Structures et des Systèmes Couplés [LMSSC]
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MATHIEU, Fabrice
459 Laboratoire d'analyse et d'architecture des systèmes [Toulouse] [LAAS]
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MAZENQ, Laurent
459 Laboratoire d'analyse et d'architecture des systèmes [Toulouse] [LAAS]
dc.contributor.author
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SOYER, Caroline
1296 Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 [IEMN]
dc.contributor.author
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COSTECALDE, Jean
1296 Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 [IEMN]
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REMIENS, Denis
1296 Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 [IEMN]
dc.contributor.author
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DEÜ, Jean-François
12568 Laboratoire de Mécanique des Structures et des Systèmes Couplés [LMSSC]
dc.contributor.author
 hal.structure.identifier
NICU, Liviu
459 Laboratoire d'analyse et d'architecture des systèmes [Toulouse] [LAAS]
dc.date.accessioned2015
dc.date.available2015
dc.date.issued2015
dc.date.submitted2015
dc.identifier.urihttp://hdl.handle.net/10985/9654
dc.description.abstractIn this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down approach combining ultraviolet (UV) lithography with other standard planar processing technologies allows us to achieve high-throughput manufacturing. Multilayer stack cantilevers with different geometries have been implemented with measured fundamental resonant frequencies in the megahertz range and Q-factor values ranging from ~130 in air up to ~900 in a vacuum at room temperature. A refined finite element model taking into account the exact configuration of the piezoelectric stack is proposed and demonstrates the importance of considering the dependence of the beam’s cross-section upon the axial coordinate. We extensively investigate both experimentally and theoretically the transduction efficiency of the implemented piezoelectric layer and report for the first time at this integration level a piezoelectric constant of d31 = 15 fm.V−1. Finally, we discuss the current limitations to achieve piezoelectric detection.
dc.description.sponsorshipANR/PNANO 2008, project NEMSPIEZO
dc.language.isoen
dc.publisherIOP Science
dc.rightsPost-print
dc.subjectNEMS
dc.subjectLarge-scale integration
dc.subjectPZT
dc.titleWafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)
dc.identifier.doi10.1088/0960-1317/25/3/035002
dc.typdocArticles dans des revues avec comité de lecture
dc.localisationCentre de Lille
dc.subject.halPhysique: matière Condensée: Science des matériaux
dc.subject.halSciences de l'ingénieur: Mécanique
dc.subject.halSciences de l'ingénieur: Mécanique: Matériaux et structures en mécanique
dc.subject.halSciences de l'ingénieur: Mécanique: Mécanique des structures
dc.subject.halSciences de l'ingénieur: Mécanique: Vibrations
dc.subject.halSciences de l'ingénieur: Micro et nanotechnologies/Microélectronique
ensam.audienceInternationale
ensam.page35002-35013
ensam.journalJournal of Micromechanics and Microengineering
ensam.volume25
ensam.issue3
hal.identifierhal-01169283
hal.version1


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