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Roughness characteristic length scales of micro-machined surfaces: A multi-scale modelling

Type
Articles dans des revues avec comité de lecture
Auteur
BIGERELLE, Maxence
GAUTIER, Alexis
IOST, Alain
211915 Mechanics surfaces and materials processing [MSMP]
11230 Laboratoire de Métallurgie Physique et Génie des Matériaux [LMPGM]

URI
http://hdl.handle.net/10985/10870
DOI
10.1016/j.snb.2006.11.006
Date
2007
Journal
Sensors and Actuators B: Chemical

Résumé

The MEMS structure integrity, their dynamic properties as well as their electrostatic characteristics, strongly depend on the achieved surfaces roughness produced by the micromachining process. It is therefore, not surprising that numerous works are devoted to propose relations between roughness and physical or mechanical properties in this field. Yet the issue is full of complexities since roughness parameters depend on the method used for their evaluation. This article introduces a new approach of the roughness characterization, based on the scaling analysis. Experimental results obtained on micro machined surfaces show that the range roughness amplitude depends on the scan length and that roughness amplitude follows three stages. The stage I is due to a smoothing effect of the surface induced by the tip radius of the profilometer, stage II presents a piecewise power-law roughness distribution until a critical length that characterises the fractal behaviour of the surface, and stage III is characterised by extreme values statistics. The fractal parameter, the extreme values estimators and the crossover between stages II and III are shown to be related to the micromachining process. As a result, an original probabilistic model based on the Generalized Lambda Distribution (GLD) is proposed to estimate the multi-scale roughness in the stage III. Finally, thanks to a Bootstrap protocol coupled with a Monte-Carlo simulation, the maximal roughness amplitude probability density function is estimated at a scale higher than the scanning length.

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Documents liés

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  • A multi-scale approach of roughness measurements: Evaluation of the relevant scale 
    VAN GORP, Adrien; BIGERELLE, Maxence; GRELLIER, Alain; IOST, Alain; NAJJAR, Denis (ELSEVIER, 2007)
    This paper proposes a new multi-scale measurement approach performed to compare the surface roughness and the visual aspect of polished surfaces. In this investigation, five specimens of glass moulds presenting different ...
  • Analyse multi-échelle de la rugosité des surfaces 
    VAN GORP, Adrien; BIGERELLE, Maxence; IOST, Alain (Université de Poitiers, 2007)
    L’analyse de la rugosité des surfaces consiste à séparer les défauts à différents ordres ou types correspondant à la forme, l’ondulation et la rugosité. La norme appliquée aux cas courants utilise un filtrage gaussien pour ...
  • A new model of the heat transfer in materials: the surfacic potential algorithm 
    BIGERELLE, Maxence; BOUNICHANE, Benaamer; HAGEGE, Benjamin; JOURANI, Abdeljalil; IOST, Alain (Inderscience Enterprises Ltd., 2010)
    This paper proposes a new simulation method of thermal transfers based on the concepts of Brownian motion via the theory of potential and the characteristics of materials. In our simulation the particles take their origins ...
  • Statistical artefacts in the determination of the fractal dimension by the slit island method 
    BIGERELLE, Maxence; IOST, Alain (ELSEVIER, 2004)
    This paper comments upon some statistical aspects of the slit island method which is widely used to calculate the fractal dimension of fractured surfaces or of materials’ features like grain geometry. If a noise is introduced ...
  • Estimating the parameters of a generalized lambda distribution 
    FOURNIER, Benjamin; RUPIN, Nicolas; BIGERELLE, Maxence; NAJJAR, Denis; IOST, Alain; WILCOX, R (ELSEVIER, 2007)
    The method of moments is a popular technique for estimating the parameters of a generalized lambda distribution (GLD), but published results suggest that the percentile method gives superior results. However, the percentile ...

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