Vickers Microhardness of Oxidized and Nonoxidized Porous Silicon

Communication avec acte
Auteur
RAHMOUN, Khadidja
38466 Unité de Recherche Matériaux et Energies Renouvelables [URMER]
IOST, Alain
211915 Mechanics surfaces and materials processing [MSMP]
KERYVIN, Vincent
57111 Institut de Physique de Rennes [IPR]
GUILLEMOT, Gildas
211915 Mechanics surfaces and materials processing [MSMP]
1158 Centre de Mise en Forme des Matériaux [CEMEF]
SANGLEBOEUF, Jean-Christophe
57111 Institut de Physique de Rennes [IPR]
GUENDOUZ, Mohamed
HAJI, Lazhar

Résumé

In this work we present our recent investigation on characterizing mechanical properties of porous silicon (PS) by using instrumented micro-indentation. Hardness and elastic modulus for oxidized and nonoxidized PS were measured. Experimental results revealed that hardness and elastic modulus are significantly lower than that of silicon substrate and decrease with increasing porosities. After oxidation an increase of the hardness and elastic modulus were observed. The task of stabilization of PS mechanical parameters can be solved with the help of oxidation.

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