• français
    • English
    français
  • Login
Help
View Item 
  •   Home
  • Laboratoire des Matériaux et Procédés (LaBoMaP)
  • View Item
  • Home
  • Laboratoire des Matériaux et Procédés (LaBoMaP)
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

The influence of the pressure on the microstructure of yttria-stabilized zirconia thin films deposited by dual magnetron sputtering

Article dans une revue avec comité de lecture
Author
DEPLA, Diederik
BESNARD, Aurélien
127742 Laboratoire Bourguignon des Matériaux et Procédés [LABOMAP]
LAMAS, Jerika

URI
http://hdl.handle.net/10985/10914
Date
2016
Journal
Vacuum

Abstract

Mixed oxide thin films, such as yttria-stabilized zirconia, deposited by dual reactive magnetron sputtering on a non-rotating substrate show a typical microstructure of bended, or tilted columns. Two effects define the tilt. The first effect is the compositional gradient over each column which results in a different lattice spacing. To accommodate this difference, the column bends. As such, the chemical composition has a major influence on the final columnar tilt. The second effect is ballistic shadowing which is controlled by the pressure-distance product. At higher pressure-distances, this second effect plays a more prominent role, and a different behaviour of the columnar tilt as a function of the film composition is noticed. The experimental trends can be understood by the use of a particle trajectory code which provides the angular and energy distribution of the atoms to a ballistic aggregation Monte Carlo code simulating the resulting microstructure.

Files in this item

Name:
LABOMAP_VACUUM_2016_BESNARD.pdf
Size:
1.361Mb
Format:
PDF
View/Open

Collections

  • Laboratoire des Matériaux et Procédés (LaBoMaP)

Related items

Showing items related by title, author, creator and subject.

  • Effect of the microstructure on the tribological properties of HIPed and PTA-welded Fe-based hardfacing alloy 
    Article dans une revue avec comité de lecture
    ARDIGO-BESNARD, Maria-Rosa; TELLIER, Arnold; BESNARD, Aurélien; CHATEAU-CORNU, Jean-Philippe (Elsevier BV, 2021)
    his work focuses on the comparison of the tribological properties of Norem02, a Fe-based hardfacing elaborated by hot isostatic pressing (HIP), a pressure-assisted sintering technique and by plasma transferred arc welding ...
  • Development of Ti PVD Films to Limit the Carburization of Metal Powders during SPS Process 
    Article dans une revue avec comité de lecture
    ARDIGO-BESNARD, Maria-Rosa; BESNARD, Aurélien; MOSER, Mathias; BUSSIÈRE, Florian (MDPI AG, 2021)
    Spark plasma sintering technique is used for the fabrication of dense materials with a fine-grained microstructure. In this process, a powder is placed into a graphite mold and a uniaxial pressure is applied by two graphite ...
  • Investigation of the Effect of Residual Stress Gradient on the Wear Behavior of PVD Thin Films 
    Article dans une revue avec comité de lecture
    TLILI, Brahim; NOUVEAU, Corinne; GUILLEMOT, Gildas; BESNARD, Aurélien; BARKAOUI, Abdelwahed (Springer Verlag/ASM International, 2018)
    The control of residual stresses has been seldom investigated in multilayer coatings dedicated to improvement of wear behavior. Here, we report the preparation and characterization of superposed structures composed of Cr, ...
  • In vitro corrosion response of CoCrMo and Ti-6Al-4V orthopedic implants with Zr columnar thin films 
    Article dans une revue avec comité de lecture
    RAHMOUNI, Khaoula; BESNARD, Aurélien; OULMI, Kafia; NOUVEAU, Corinne; HIDOUSSI, Aissam; ZAABAT, Mourad (Elsevier BV, 2022)
    This study focuses on the functionalized modification of Ti-6Al-4V and CoCrMo alloys substrates widely used by the biomedical domain as total joint replacements (TJRs) of the hip and knee. To improve the corrosion resistance ...
  • The Effect of Bilayer Periods and Their Thickness in Magnetron Sputtering Protective Multilayer Coatings for Tribological Applications 
    Article dans une revue avec comité de lecture
    AOUADI, Khalil; NOUVEAU, Corinne; BESNARD, Aurélien; TLILI, Brahim; MONTAGNE, Alex; CHAFRA, Moez (Springer Science and Business Media LLC, 2021)
    CrN/CrAlN thin films were deposited by DC reactive magnetron sputtering. The influence of CrN/CrAlN bilayer thickness on the microstructure, mechanical, and tribological properties was studied. Crystallinity of the layers ...

Browse

All SAMCommunities & CollectionsAuthorsIssue DateCenter / InstitutionThis CollectionAuthorsIssue DateCenter / Institution

Newsletter

Latest newsletterPrevious newsletters

Statistics

Most Popular ItemsStatistics by CountryMost Popular Authors

ÉCOLE NATIONALE SUPERIEURE D'ARTS ET METIERS

  • Contact
  • Mentions légales

ÉCOLE NATIONALE SUPERIEURE D'ARTS ET METIERS

  • Contact
  • Mentions légales