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Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers

Article dans une revue avec comité de lecture

CHEVALIER, Xavier; GOMES CORREIA, Cindy; POUND-LANA, Gwenaelle; BÉZARD, Philippe; SÉRÉGÉ, Matthieu; PETIT-ETIENNE, Camille; GAY, Guillaume; CUNGE, Gilles; CABANNES-BOUÉ, Benjamin; NICOLET, Célia; NAVARRO, Christophe; CAYREFOURCQ, Ian; MÜLLER, Marcus; HADZIIOANNOU, Georges; ILIOPOULOS, Ilias; FLEURY, Guillaume; ZELSMANN, Marc (American Chemical Society (ACS), 2021)

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Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers