• français
    • English
    français
  • Login
Help
View Item 
  •   Home
  • Laboratoire Procédés et Ingénierie en Mécanique et Matériaux (PIMM)
  • View Item
  • Home
  • Laboratoire Procédés et Ingénierie en Mécanique et Matériaux (PIMM)
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

Legitimate domain of a Newtonian behavior for thermal nanoimprint lithography

Article dans une revue avec comité de lecture
Author
TEYSSEDRE, Hubert
40214 Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]
86289 Laboratoire Procédés et Ingénierie en Mécanique et Matériaux [PIMM]
GILORMINI, Pierre
86289 Laboratoire Procédés et Ingénierie en Mécanique et Matériaux [PIMM]
LANDIS, Stefan
40214 Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]
REGNIER, Gilles
86289 Laboratoire Procédés et Ingénierie en Mécanique et Matériaux [PIMM]

URI
http://hdl.handle.net/10985/7175
DOI
10.1016/j.mee.2013.03.169
Date
2013
Journal
Microelectronic Engineering

Abstract

Nanoimprint lithography is an efficient way to reproduce nanostructures down to 20 nanometers in sub-micrometer polymeric films. To optimize this process, simulation using a Newtonian behavior is a cheap and efficient way to predict the polymer flow in micro and nano size cavities. This behavior is nevertheless limited to flows with shear rates below a critical value that can be determined with standard rheology measurements. We have investigated the validity domain of this behavior to simulate thermal NIL. This domain of validity is composed of two uncoupled functions, one for the material properties and the mean pressure applied to the pattern, and one for the geometry considered. The latter function has been determined with numerical simulations using the natural element method. It is demonstrated that knowing the mean applied pressure, the critical shear rate, and the viscosity of the material we are able to determine, depending on stamp geometry, if shear-thinning may or may not occur during an imprinting process.

Files in this item

Name:
PIMM-ME-Tesseydre-2013.pdf
Size:
347.4Kb
Format:
PDF
View/Open

Collections

  • Laboratoire Procédés et Ingénierie en Mécanique et Matériaux (PIMM)

Related items

Showing items related by title, author, creator and subject.

  • Influence of thermal diffusion and shear-thinning during the leveling of nanoimprinted patterns in a polystyrene thin film 
    Article dans une revue avec comité de lecture
    TEYSSEDRE, Hubert; LANDIS, Stefan; GILORMINI, Pierre; REGNIER, Gilles (Springer Verlag, 2015)
    When capillary forces prevail, the leveling of the free surface of a fluid film is a natural phenomenon that has already found applicative interest either with brushmarks for paint coatings or for rheology on polymeric ...
  • Limitations of simple flow models for the simulation of nanoimprint 
    Article dans une revue avec comité de lecture
    TEYSSEDRE, Hubert; GILORMINI, Pierre; REGNIER, Gilles (2013)
    A quick evaluation of the forces involved in nanoimprint would be very helpful in the prevention of mold deflection. Unfortunately, it is shown here that assuming simplified flows may lead to quite incorrect evaluations ...
  • On using the leveling of the free surface of a Newtonian fluid to measure viscosity and Navier slip length 
    Article dans une revue avec comité de lecture
    GILORMINI, Pierre; TEYSSEDRE, Hubert (Royal Society, The, 2013)
    Measuring the relaxation time involved in the leveling of the free surface of a Newtonian fluid laid on a substrate can give access to material parameters. It is shown here how most favorable pattern geometries of the free ...
  • Extension of the natural element method to surface tension and wettability for the simulation of polymer flows at the micro and nano scales 
    Article dans une revue avec comité de lecture
    TEYSSEDRE, Hubert; GILORMINI, Pierre (Elsevier, 2013)
    The natural element method is used to simulate two-dimensional viscous flows where interfacial effects must be taken into account, for application to polymer melts at the micro and nano scales. The variational formulation ...
  • A torsion test for the study of the large deformation recovery of shape memory polymers 
    Article dans une revue avec comité de lecture
    DIANI, Julie; FREDY, Carole; GILORMINI, Pierre; MERCKEL, Yannick; REGNIER, Gilles; ROUSSEAU, Ingrid (Elsevier, 2011)
    A torsion device was designed and built for testing the shape fixity and shape recovery of shape memory polymers at large deformation. A simple thermal chamber was used to regulate the thermal environment during testing ...

Browse

All SAMCommunities & CollectionsAuthorsIssue DateCenter / InstitutionThis CollectionAuthorsIssue DateCenter / Institution

Newsletter

Latest newsletterPrevious newsletters

Statistics

Most Popular ItemsStatistics by CountryMost Popular Authors

ÉCOLE NATIONALE SUPERIEURE D'ARTS ET METIERS

  • Contact
  • Mentions légales

ÉCOLE NATIONALE SUPERIEURE D'ARTS ET METIERS

  • Contact
  • Mentions légales