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Elaboration, characterization of Cr-N based coatings

Communication avec acte
Author
TLILI, Brahim
127742 Laboratoire Bourguignon des Matériaux et Procédés [LABOMAP]
NOUVEAU, Corinne
127742 Laboratoire Bourguignon des Matériaux et Procédés [LABOMAP]
GUILLEMOT, Gildas
1158 Centre de Mise en Forme des Matériaux [CEMEF]

URI
http://hdl.handle.net/10985/7627
DOI
10.1063/1.3552365
Date
2010

Abstract

Cr, CrN and CrAlN monolayers were synthesized by RF dual magnetron sputtering on AISI4140 steel and silicon substrates at 200°C. Multilayers coatings based on the three mono-layers such as CrN/CrAlN and Cr/CrN/CrAlN were also synthesized only on Si. The physico-chemical and mechanical properties of the layers were determined by AFM, SEM+WDS, stress, roughness and nanoindentation measurements. The influence of the thickness on the mechanical properties of the monolayers stresses has been studied and as a consequence we compared the mono and multilayers stress state.

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