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Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope

Article dans une revue avec comité de lecture
Author
BOUSCAUD, Denis
PATOOR, Etienne
ccBERVEILLER, Sophie
178323 Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux [LEM3]
ccPESCI, Raphaël

URI
http://hdl.handle.net/10985/7800
DOI
10.1016/j.ultramic.2012.01.018
Date
2012
Journal
Ultramicroscopy

Abstract

A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Micro-scope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced.

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