Comparison of CrAlN layers obtained with one (CrAl) or two targets (Cr and Al) by magnetron sputtering
Article dans une revue avec comité de lecture
The aim of this study is to compare the properties of CrAlN coatings obtained by magnetron sputtering with one (CrAl) or two targets (Cr and Al). The influence of parameters such as the target bias voltage, the working pressure, the deposition time and the bias voltage applied on the Cr or Al targets on the properties of the layers was studied. We characterized the films by X-ray Diffraction, Scanning Electron Microscopy, coupled with Energy Dispersive Spectroscopy, nanoindentation and their residual stresses were also determined. The optimal films obtained with both methods are well crystallized, well-adherent to the substrate, and contained similar amounts of Al (20–30 at.%). The optimal coatings synthesized with one target presented properties not as good as those realized with two targets. Nevertheless, films made with one target showed a lower frictional coefficient probably due to composition control. The lack of compositional control with the use of one target limits the optimization process. With two targets, we have greater control over the film composition. This leads to higher hardness, lower stresses, and improved Young's modulus over films produced with a single CrAl target. Additionally, the morphologies are different (columnar with CrAl and dense with Cr and Al). To conclude, it seems more justified to work if possible with two independent targets.
Showing items related by title, author, creator and subject.
Experimental investigation of the mechanical micro structural and thermal properties of thin CrAIN layers deposited by PVD technique for various aluminum percentages Article dans une revue avec comité de lectureGHRIB, Taher; TLILI, Brahim; BENLATRECHE, Yacine; LAMBERTIN, Michel; YACOUBI, Noureddine; ENNASRI, M.; NOUVEAU, Corinne (Elsevier, 2009)The thin film of chromium nitride and their derivatives obtained by the filing process physical vapor deposition attract more and more attention from industry given their high resistance to wear. This quality of these ...
Etude des propriétés microstructurales, mécaniques, thermiques et de la porosité des couches minces de CrAlN déposées par PVD sous différents pourcentages d’aluminium Communication avec acteTLILI, Brahim; BENLATRECHE, Yacine; GHRIB, Taher; NOUVEAU, Corinne (Société Tunisienne de Physique (S.T.P), 2008)Several experimental investigations have led to the development of CrAlN (Chrome Aluminum Nitride) hard coatings by varying the aluminum target bias voltage, in preference to the traditional CrN coating. The present work ...
Communication avec acteIn the present investigation, novel Cr/CrN, CrN/CrAlN and Cr/CrN/CrAlN multilayered coatings thin films have been developed by dual RF magnetron sputtering. They consist of superposing Cr, CrN and CrAlN layers of 50–500nm ...
Correlation between thermal properties and aluminum fractions in CrAlN layers deposited by PVD technique Article dans une revue avec comité de lectureTLILI, Brahim; MUSTAPHA, Nasri; BENLATRECHE, Yacine; GUILLEMOT, Gildas; LAMBERTIN, Michel; NOUVEAU, Corinne (Elsevier, 2010)The CrAlN coatings are a good alternative to conventional CrN coatings especially for high temperature oxidation-resistance applications. Different CrAlN coatings were deposited on silicon (100) by PVD (Physical vapor ...
Communication avec acteAKNOUCHE, Hamid; BENLATRECHE, Yacine; ROUSSELOT, Christophe; PILLOUD, David; ZERIZER, Abdellatif; MARCHAL, Rémy; NOUVEAU, Corinne (2010)Des revêtements à base de nitrure de chrome réalisés par pulvérisation triode ont été testés en déroulage et défonçage du bois. L’efficacité des revêtements triode a été montrée en usinage de MDF (Medium Density Fiberboard), ...