Comparison of CrAlN layers obtained with one (CrAl) or two targets (Cr and Al) by magnetron sputtering
TypeArticles dans des revues avec comité de lecture
The aim of this study is to compare the properties of CrAlN coatings obtained by magnetron sputtering with one (CrAl) or two targets (Cr and Al). The influence of parameters such as the target bias voltage, the working pressure, the deposition time and the bias voltage applied on the Cr or Al targets on the properties of the layers was studied. We characterized the films by X-ray Diffraction, Scanning Electron Microscopy, coupled with Energy Dispersive Spectroscopy, nanoindentation and their residual stresses were also determined. The optimal films obtained with both methods are well crystallized, well-adherent to the substrate, and contained similar amounts of Al (20–30 at.%). The optimal coatings synthesized with one target presented properties not as good as those realized with two targets. Nevertheless, films made with one target showed a lower frictional coefficient probably due to composition control. The lack of compositional control with the use of one target limits the optimization process. With two targets, we have greater control over the film composition. This leads to higher hardness, lower stresses, and improved Young's modulus over films produced with a single CrAl target. Additionally, the morphologies are different (columnar with CrAl and dense with Cr and Al). To conclude, it seems more justified to work if possible with two independent targets.
Showing items related by title, author, creator and subject.
AKNOUCHE, Hamid; NOUVEAU, Corinne; BENLATRECHE, Yacine; ROUSSELOT, Christophe; PILLOUD, David; ZERIZER, Abdellatif; MARCHAL, Rémy (2010)Des revêtements à base de nitrure de chrome réalisés par pulvérisation triode ont été testés en déroulage et défonçage du bois. L’efficacité des revêtements triode a été montrée en usinage de MDF (Medium Density Fiberboard), ...
BENLATRECHE, Yacine; NOUVEAU, Corinne; AKNOUCHE, Hamid; MARCHAL, Rémy (Lavoisier, 2008)The aim of this study was to check the influence of Al content into CrN films on their properties. CrAlN films were deposited by reactive magnetron sputtering using chromium and aluminum pure targets. The atomic content ...
BENLATRECHE, Yacine; NOUVEAU, Corinne; MARCHAL, Rémy; FERREIRA-MARTIN, Jean-Pierre; AKNOUCHE, Hamid (Elsevier, 2009)Nowadays, medium density fibreboard (MDF) composite wood is more and more used in the furniture industry to replace bulk wood such as oak, beech, etc. Indeed, this material presents good mechanical properties, is easy to ...
Study of the wear behaviour of carbide-tipped tools untreated and CrN-treated in the field of the breaking up of the pine of Alep AKNOUCHE, Hamid; ZERIZER, Abdellatif; NOUVEAU, Corinne; BENLATRECHE, Yacine (Presses Polytechniques et Universitaires Romandes, 2007)This work aims to present an experimental step related to a technique of wood machining in order to evaluate wear for the case of the breaking up of the pine of Alep. In our case the study has been done with one untreated ...
Physical and Mechanical Properties of CrAlN and CrSiN Ternary Systems for Wood Machining Applications BENLATRECHE, Yacine; NOUVEAU, Corinne; AKNOUCHE, Hamid; IMHOFF, Luc; MARTIN, Nicolas; GAVOILLE, Joseph; ROUSSELOT, Christophe; RAUCH, Jean-Yves; PILLOUD, David (Wiley, 2009)Nowadays, almost all the cutting tools in metal machining are protected with a surface treatment. Nevertheless, this is not the case in woodmachining where no tools are protected, except by thermal treatments, and so they ...