Piezoelectric amplifiers with integrated actuation and sensing capabilities
Communication avec acte
Auteur
THOMAS, OlivierMATHIEU, FabriceMANSFIELD, W.HUANG, C.TROLIER MCKINSTRY, SusanNICU, LiviuRésumé
We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.
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Article dans une revue avec comité de lectureTHOMAS, Olivier; ; ; ; ; (American Institute of Physics, 2013)
We report, in this work, on unprecedented levels of parametric amplification in microelectromechanical resonators, operated in air, with integrated piezoelectric actuation and sensing capabilities. The method relies on an ...
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Article dans une revue avec comité de lecture;THOMAS, Olivier; ; ; ; ; ; ; (IOP Publishing, 2015)
In this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down ...
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Communication avec acte(2013)In this work, we demonstrate the integration of piezoelectric actuation means on arrays of nanocantilevers at the wafer scale. We use lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent ...
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Article dans une revue avec comité de lecture; ; ; ; ; ;THOMAS, Olivier; ; ; ; ; (Wiley, 2018)
[FeII(Htrz)2(trz)](BF4) spin crossover particles of 85 nm mean size are dispersed in an SU-8 polymer matrix and spray-coated onto silicon microcantilevers. The subsequent photothermal treatment of the polymer resist leads ...
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Article dans une revue avec comité de lecture; ; ; ;THOMAS, Olivier; ; ; (IOP Publishing, 2020-01)
A piezoelectric nanoelectromechanical system (NEMS) with integrated actuation and detection capabilities was fabricated using lead zirconate titanate (PZT) thin films patterned by microcontact printing. PZT-coated cantilever ...