Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators
Communication avec acte
Author
DEZEST, DenisMATHIEU, FabriceMAZENQ, LaurentSOYER, CarolineCOSTECALDE, JeanREMIENS, DenisTHOMAS, OlivierDEÜ, Jean-FrançoisNICU, LiviuAbstract
In this work, we demonstrate the integration of piezoelectric actuation means on arrays of nanocantilevers at the wafer scale. We use lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scale
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