Zn1-xMgxO thin films deposited by original Infrared assisted Spray Chemical Vapor Deposition: evaluation of structural, optical and electrical properties with the aim of provide Cu(In,Ga)Se2 based photovoltaic devices
TypeArticles dans des revues avec comité de lecture
In this work, magnesium doped zinc oxide (Zn1-xMgxO) thin films were deposited using an original infrared assisted Spray Chemical Vapor Deposition (Spray-CVD) technique on borosilicate glass substrates. With a simple, safe and cost-effective apparatus, Zn1-xMgxO thin films was studied in a range of 0 to 40% in precursor mass ratio r = [Mg]/([Zn]+[Mg]). The optimal deposition temperature was 500°C. X-ray diffraction analysis confirmed the presence of magnesium in the hexagonal Wurtzite crystal lattice of zinc oxide for r values lower than 30%. The optical properties have been investigated by spectrophotometry and showed that the transparency is higher than 80% in the visible and infrared spectral domain for r values lower than 20%. The band gap energy increased from 3.28 to 3.94 eV (0 < r < 40%), and the resistivity of the samples increased from 4.16.10-2 to 7.09.10+3 Ω.cm (Hall effect measurement). Additional characterizations have been realized by X-ray fluorescence (XRF) and energy dispersive X-ray spectrometry (EDX). All results demonstrate that Zn1-xMgxO thin films with r = 20% obtained by our Spray-CVD method is an interesting candidate for buffer layer application in Cu(In,Ga)Se2 based solar cells.
Showing items related by title, author, creator and subject.
Thermal study of an aluminium nitride ceramic heater for spray CVD on glass substrates by quantitative thermography RIOU, Olivier; LOGERAIS, Pierre-Olivier; FROGER, Vincent; DURASTANTI, Jean-Félix; BOUTEVILLE, Anne (Taylor & Francis, 2013)A thermographic approach is used to determine the temperature of an aluminium nitride hot plate as a glass substrate heater for depositing thin films by spray CVD (Chemical Vapour Deposition). In this context, the temperature ...
TOUIHRI, Saad; CATTIN, Linda; NGUYEN, Duc-Tuong; MORSLI, Mustapha; LOUARN, Guy; BOUTEVILLE, Anne; FROGER, Vincent; BERNÈDE, Jean-Christian (ELSEVIER, 2012)In2O3 thin films (100 nm thick) have been deposited by reactive evaporation of indium, in an oxygen partial atmosphere. Conductive (σ = 3.5×103 S/cm) and transparent films are obtained using the following experimental ...
Improvement of temperature homogeneity of a silicon wafer heated in a rapid thermal system (RTP: Rapid Thermal Process) by a filtering window LOGERAIS, Pierre-Olivier; RIOU, Olivier; DELALEUX, Fabien; DURASTANTI, Jean-Félix; BOUTEVILLE, Anne (Elsevier, 2015)Rapid thermal processes are used in various key stages in the microelectronics industry. In this study, the heat transfer in a rapid thermal system is modelled with the finite volume method. The influence of the radiative ...
Influence of the window thermal diffusivity on the silicon wafer temperature in a rapid thermal system LOGERAIS, Pierre-Olivier; KHELALFA, Raouf; RIOU, Olivier; DURASTANTI, Jean-Félix; BOUTEVILLE, Anne (Taylor & Francis, 2015)The heating of a silicon wafer in a rapid thermal process is studied by numerical simulation. In the model, the equations of conservation of mass and energy are solved with the finite volume method and the determination ...
BAIZ, Sarah; TSENG, Qingzong; PERQUIS, Lucie; OCTON, Jean; RHONÉ, Benoît; COSCOY, Sylvie; AMBLARD, François; SEMETE, Vincent (American Institute of Physics Inc., 2018)Cells are able to develop various types of membrane protrusions that modulate their adhesive, migratory, or functional properties. However, their ability to form basal protrusions, particularly in the context of epithelial ...