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Influence of the window thermal diffusivity on the silicon wafer temperature in a rapid thermal system

Article dans une revue avec comité de lecture

LOGERAIS, Pierre-Olivier; KHELALFA, Raouf; RIOU, Olivier; DURASTANTI, Jean-Félix; BOUTEVILLE, Anne (Taylor & Francis, 2015)

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Author BOUTEVILLE, Anne (1)DURASTANTI, Jean-Félix (1)

KHELALFA, Raouf (1)

LOGERAIS, Pierre-Olivier (1)RIOU, Olivier (1)Circle/Institution

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