Imperfection-sensitive ductility of aluminium thin films

COULOMBIER, Marc; BOE, Alexandre; BRUGGER, Charles; RASKIN, Jean.Pierre; PARDOEN, Therry

Article dans une revue avec comité de lecture

Author

COULOMBIER, Marc
169760 Institute of Mechanics, Materials and Civil Engineering [Louvain] [IMMC]

BOE, Alexandre
1296 Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
244724 Institut de Recherche sur les Composants logiciels et matériels pour l'Information et la Communication Avancé - UAR 3380 [IRCICA]

BRUGGER, Charles
32956 Science et Ingénierie des Matériaux et Procédés [SIMaP]
164351 Institut de Mécanique et d'Ingénierie de Bordeaux [I2M]

RASKIN, Jean.Pierre
7935 Dispositifs Intégrés et Circuits Electroniques Machine Learning Group [DICE - MLG]
99828 Département de mathématique [Louvain]
197411 Institute of Information and Communication Technologies, Electronics and Applied Mathematics [ICTEAM]

PARDOEN, Therry
99828 Département de mathématique [Louvain]
169760 Institute of Mechanics, Materials and Civil Engineering [Louvain] [IMMC]

URI

http://hdl.handle.net/10985/14836

DOI

10.1016

Date

2010

Journal

Acta Materialia

Abstract

Ductility, defined as the strain at the onset of necking, has been characterized in thin Al films using an on-chip, internal stress actuated, microtensile testing setup. In the smallest specimens, the ductility is equal to 0.08 and 0.27 for 200 and 375 nm thick films, respectively, while the average strain-hardening exponents are, respectively, equal to 0.11 and 0.23. In addition to the thickness effect, ductility decreases with increasing specimen size due to imperfection sensitivity, involving a size-dependent statistical behaviour.