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Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators

Communication avec acte

DEZEST, Denis; MATHIEU, Fabrice; MAZENQ, Laurent; SOYER, Caroline; COSTECALDE, Jean; REMIENS, Denis; THOMAS, Olivier; DEÜ, Jean-François; NICU, Liviu (2013)

Phase resonance testing of highly flexible structures: Measurement of conservative nonlinear modes and nonlinear damping identification

Article dans une revue avec comité de lecture

DEBEURRE, Marielle;

BENACCHIO, Simon; GROLET, Aurélien; GRENAT, Clément;

GIRAUD-AUDINE, Christophe; THOMAS, Olivier (Elsevier BV, 2024-06)

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Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators

Phase resonance testing of highly flexible structures: Measurement of conservative nonlinear modes and nonlinear damping identification