Characterization of CrAlN Films Synthesized by DC Reactive Magnetron Sputtering
Article dans une revue avec comité de lecture
Author
AOUADI, KhalilNOUVEAU, CorinneBESNARD, AurélienTLILI, Brahim 
MONTAGNE, AlexCHAFRA, MoezAbstract
CrAlN films were synthesized by DC reactive magnetron sputtering. The influence of the aluminium content on the microstructure, hardness and the friction coefficient of the CrAlN films have been investigated. Results indicate that all CrAlN coatings present a columnar and dense structure. Also, CrAlN coatings present a better hardness than CrN coating. The increase of Al rate from 3.5 to 11% is accompanied by a decrease of hardness from 28 to 24 GPa and then it increases for an Al rate of 24%. The addition of Al to the CrN system causes an increase of the friction coefficient and the wear resistance.
Files in this item
Related items
Showing items related by title, author, creator and subject.
-
Article dans une revue avec comité de lecture; ; ; ; ;MONTAGNE, Alex (Springer Science and Business Media LLC, 2021)
CrN/CrAlN thin films were deposited by DC reactive magnetron sputtering. The influence of CrN/CrAlN bilayer thickness on the microstructure, mechanical, and tribological properties was studied. Crystallinity of the layers ...
-
Article dans une revue avec comité de lecture(Springer Verlag/ASM International, 2019)The objective of the present paper is to study the influence of the substrate bias voltage on the microstructure, composition, deposition rate, tribological and corrosion properties of CrN coatings obtained by DC magnetron ...
-
Communication avec acte(Springer International Publishing, 2020)The CrN/CrAlN/Cr2O3 multilayer coatings were deposited by reactive magnetron sputtering DC on 90CrMoV8 stainless steel under various oxygen flow rates. The structure and crystalline phases are characterized by the x-ray ...
-
Effect of substrate bias voltage on the microstructure and tribological properties of CrN coatings Article dans une revue avec comité de lecture(Lavoisier, 2016)Microstructure, wear and friction coefficient of cr-based magnetron sputtered layers. CrN films were deposited on stainless steel and silicon substrates via magnetron reactive sputtering under a systematic variation of the ...
-
Communication avec acte; ;MONTAGNE, Alex; ; ; (Springer Nature Switzerland, 2023-09-13)
In this study, CrN/CrAlN multilayer coating with different periods (Ʌ = 1, 2, 3, 4) were deposited on stainless steel (90CrMoV8) and silicon Si (100) samples by DC magnetron sputtering. The results obtained exhibited ...