Characterization of CrAlN Films Synthesized by DC Reactive Magnetron Sputtering

Article dans une revue avec comité de lecture
Author
AOUADI, Khalil
232921 Université de Carthage - University of Carthage
NOUVEAU, Corinne
127742 Laboratoire Bourguignon des Matériaux et Procédés [LABOMAP]
BESNARD, Aurélien
127742 Laboratoire Bourguignon des Matériaux et Procédés [LABOMAP]
TLILI, Brahim
300862 Ecole Nationale d'Ingénieurs de Tunis [ENIT]
MONTAGNE, Alex
211915 Mechanics surfaces and materials processing [MSMP]
CHAFRA, Moez
232921 Université de Carthage - University of Carthage
300407 Ecole Polytechnique de Tunisie

URI
http://hdl.handle.net/10985/19689
DOI
10.1007/978-3-030-52071-7_40
Date
2021
Journal
Lecture Notes in Mechanical Engineering

Abstract

CrAlN films were synthesized by DC reactive magnetron sputtering. The influence of the aluminium content on the microstructure, hardness and the friction coefficient of the CrAlN films have been investigated. Results indicate that all CrAlN coatings present a columnar and dense structure. Also, CrAlN coatings present a better hardness than CrN coating. The increase of Al rate from 3.5 to 11% is accompanied by a decrease of hardness from 28 to 24 GPa and then it increases for an Al rate of 24%. The addition of Al to the CrN system causes an increase of the friction coefficient and the wear resistance.

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