Characterization of CrAlN Films Synthesized by DC Reactive Magnetron Sputtering
TypeArticles dans des revues avec comité de lecture
CrAlN films were synthesized by DC reactive magnetron sputtering. The influence of the aluminium content on the microstructure, hardness and the friction coefficient of the CrAlN films have been investigated. Results indicate that all CrAlN coatings present a columnar and dense structure. Also, CrAlN coatings present a better hardness than CrN coating. The increase of Al rate from 3.5 to 11% is accompanied by a decrease of hardness from 28 to 24 GPa and then it increases for an Al rate of 24%. The addition of Al to the CrN system causes an increase of the friction coefficient and the wear resistance.
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Effect of substrate bias voltage on the microstructure and tribological properties of CrN coatings AOUADI, Khalil; NOUVEAU, Corinne; BESNARD, Aurélien; TLILI, Brahim; CHAFRA, Moez (Lavoisier, 2016)Microstructure, wear and friction coefficient of cr-based magnetron sputtered layers. CrN films were deposited on stainless steel and silicon substrates via magnetron reactive sputtering under a systematic variation of the ...
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Influence of Substrate Bias Voltage on Corrosion and Wear Behavior of Physical Vapor Deposition CrN Coatings AOUADI, Khalil; TLILI, Brahim; NOUVEAU, Corinne; BESNARD, Aurélien; CHAFRA, Moez; SOULI, Rania (Springer Verlag - ASM International, 2019)The objective of the present paper is to study the influence of the substrate bias voltage on the microstructure, composition, deposition rate, tribological and corrosion properties of CrN coatings obtained by DC magnetron ...
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