Finite element mesh generation for nano-scale modeling of tilted columnar thin films for numerical simulation
Communication avec acte
Glancing Angle Deposition (GLAD) is a technique used in Physical Vapor Deposition (PVD) to prepare thin films with specific properties. During the deposition process, a tilt is introduced between the sputtered atoms flux and the normal of the substrate surface. By shadowing effect, this induces tilted nano-columns that affect the properties of the coating. To predict these properties, several existing tools simulate the different steps of the PVD deposition. First, a simulation of the sputtering of atoms from a metallic target is made, followed by the computation of the atoms transportation from the target to the substrate. Finally, the growth of the film is computed. All these simulations use point based representation to represent the deposited atoms. However, such representation is not suited for classical finite elements analysis (FEA). In this paper, a methodology for generating FEA meshes from the points produced by film growth simulation is presented. Two major scientific challenges are overcome. Firstly, how to segment the ”film” point cloud into a collection of individual “columns” and secondly, how to generate the meshes of the columns that are approximately represented by points. The point cloud segmentation is computed through neighbourhood notion. The mesh is obtained as an implicit surface by the marching cubes algorithm and smoothed by a Humphrey’s class Laplacian algorithm. Numerical simulations based on the generated FEA meshes will be conducted using Abaqus FEA software.
Fichier(s) constituant cette publication
Cette publication figure dans le(s) laboratoire(s) suivant(s)
Visualiser des documents liés par titre, auteur, créateur et sujet.
Selection of the numerical formulation for modeling the effect of tool cutting edge microgeometries in machining of Ti6Al4V titanium alloy Article dans une revue avec comité de lectureThe Finite-element method (FEM) is often used to simulate the metal machining process. Currently, several formulations are used in metal cutting simulation, such as Lagrangian (LAG), Eulerian (EUL), Arbitrary Lagrangian–Eulerian ...
Study of the influence of the pressure and rotational motion of 3D substrates processed by magnetron sputtering: A comparative study between Monte Carlo modelling and experiments Article dans une revue avec comité de lectureOver the last ten years, low pressure plasma solutions for materials surface treatment have been remarkable. Nevertheless, the deposition of films with a uniform thickness on 3D complex shapes is still a challenge for ...
Highly responsive and accurate temperature measurements in orthogonal cutting through innovative single leg thermocouple Article dans une revue avec comité de lectureHAMM, Ivan; ROSSI, Frédéric; POULACHON, Gérard; MARCON, Bertand; BIREMBAUX, Hélène; MAURY, Nicolas; VALADON, Stéphane; LABARTHE, Francis (2021)During machining, most of the thermal sources are resulting from the conversion of mechanical energy during the chip shearing mechanism and the intense frictions between the tool, the chip, and the machined surface. Thermal ...
Austenitic-to-austenitic-ferritic stainless steel transformation via PVD powder surface functionalization and spark plasma sintering Article dans une revue avec comité de lectureARDIGO-BESNARD, Maria-Rosa; BESNARD, Aurélien; PINOT, Yoann; BUSSIÈRE, Florian; CHATEAU-CORNU, J.-P.; VANDENABEELE, C.; LUCAS, S.; WATIEZ, Noé; DESCAMPS-MANDINE, Armel; JOSSE, Claudie; PROIETTI, Arnaud (Elsevier BV, 2024-03)The present work investigates a new alloy design approach to elaborate stainless steel grades with an austeniticferritic microstructure. The originality of the study is the use, as starting material, of a 316 L austenitic ...
Communication avec acteRAIMBAUD, Pierre; FIGUEROA, Pablo; LOU, Ruding; HERNANDEZ, José Tiberio; MERIENNE, Frédéric; DANGLADE, Florence (2019)The Building Information Modelling (BIM) currently contributes to deeply modify the Architecture, Construction and Engineering (AEC) industry by improving data management, task planning, and architecture design etc. ...