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Comparative studies on Mo-Cr-N and Al-Cr-N coatings obtained by PVD dual magnetron sputtering

Article dans une revue avec comité de lecture
Author
BENLATRECHE, Yacine
RAHIL, Issam
92851 Université de Constantine [Algérie] = University of Constantine [Algeria]
MARCHAL, Rémy
CHEKOUR, Lounis
92851 Université de Constantine [Algérie] = University of Constantine [Algeria]
NOUVEAU, Corinne
127742 Laboratoire Bourguignon des Matériaux et Procédés [LABOMAP]

URI
http://hdl.handle.net/10985/7632
DOI
10.1002/ppap.200930406
Date
2009
Journal
Plasma Processes and Polymers

Abstract

Recently, several studies have shown that the addition of a secondary element likes Al, Si, etc. to nitride and carbide binary systems such as Ti–N and Cr–N improved their structural and mechanical properties and also their thermal stability. In this study, we realized a comparison between the effects of aluminum or molybdenum addition on the properties of the Cr–N system. The (Cr,Al)N and (Cr,Mo)N films were deposited by RF dual magnetron sputtering. To control the aluminum and molybdenum contents in (Cr,Al)N and in (Cr,Mo)N films, respectively, we modified the Cr, Al and Mo target bias. The structural, morphological and composition analyses of the deposited films were carried out using X-ray diffraction (XRD) and SEM equipped with an energy dispersive spectroscopy (EDS) microanalysis. The variation of the residual stresses with the Al and Mo contents has been studied using the Newton’s rings method. The obtained Al contents in (Cr,Al)N deposited films varied between 0 and 51 at.% while the Mo contents in (Cr,Mo)N layers varied between 0 and 42 at.%. A morphological change from amorphous to columnar films has been observed with the addition of Al in the case of (Cr,Al)N coatings, while all the (Cr,Mo)N films presented a columnar structure. The residual stresses of the (Cr,Mo)N coatings are higher than the (Cr,Al)N ones but they exhibited a similar behavior for both coatings.

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