Z calibration of the LNE ultra precision coordinate measuring machine

Abstract

The Laboratoire National de Métrologie et d’Essais (LNE) has developed an innovative ultra precision coordinate measuring machine [1,2] traceable to the national length standard. This machine can be equipped with different kinds of sensors and is dedicated to the measurement with nanometer uncertainties of features, standards and in more general way three-dimensional objects. The measuring range is 300 mm x 300 mm x 50 μm. The objective in term of uncertainty is to reach 30 nm in X and Y directions for a 300 mm displacement and about few nanometers for the 50 μm vertical displacement. For the geometric calibration of this machine, dedicated procedures have been developed. The present paper will focus more specifically on the one used for the Z calibration.