• français
    • English
    français
  • Login
Help
View Item 
  •   Home
  • Laboratoire des Matériaux et Procédés (LaBoMaP)
  • View Item
  • Home
  • Laboratoire des Matériaux et Procédés (LaBoMaP)
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

Nano- and micro-scale morghological defects in oxidized a-SiC: H thin films

Article dans une revue avec comité de lecture
Author
VASIN, Andriy
GOMENIUK, Yuri
RUSAVSKY, Audrey
NAZAROV, Alexey N.
LYSENKO, V.S.
LYTVYN, Petro M.
GONTAR, O.G.
STARIK, Sergii P.
NOUVEAU, Corinne
127742 Laboratoire Bourguignon des Matériaux et Procédés [LABOMAP]
ASHOK, S.
127049 Department of Chemistry, The Pennsylvania State University

URI
http://hdl.handle.net/10985/10088
DOI
10.1002/pssc.201200861
Date
2013
Journal
physica status solidi (c)

Abstract

Amorphous carbon rich a-SiC:H films were deposited on silicon substrates by RF-magnetron sputtering of SiC target in argon/methane gas mixture. The principal focus of this study was investigation of the effect of thermal oxidation on structure and morphology reconstruction in a-SiC:H amorphous network. The density of the films was varied over the range 1.6-2.2 g/cm2 by varying the magnetron discharge power. The local nano- and micro-scale surface morphology and chemical composition distribution were examined by atomic force microscopy, scanning electron microscopy equipped with Auger electron scanning system and optical profilometry. It was found that partial oxidation leads to local structure reconstruction accompanied by transformation of mechanical stresses from compressive to tensile. Formation of carbon-enriched nano- and micro-scale regions was observed after oxidation in low density samples. We attrribute these morphological defects to migration and precipitation of carbon species released in the process of oxidation of the SiC amorphous network. The mechanism of tensile stresses generation is also discussed.

Files in this item

Name:
LABOMAP_PSSc_2013_NOUVEAU.pdf
Size:
661.6Kb
Format:
PDF
Embargoed until:
2017-01-01
View/Open

Collections

  • Laboratoire des Matériaux et Procédés (LaBoMaP)

Related items

Showing items related by title, author, creator and subject.

  • Study of the interaction between a Zirconium thin film and an EN C100 steel substrate: temperature effect 
    Article dans une revue avec comité de lecture
    BENOUARETH, Karim; TRISTANT, Pascal; JAOUL, Cédric; LE NINIVEN, Christophe; NOUVEAU, Corinne; DUBLANCHE-TEXIER, Christelle; BOUABELLOU, Abderrahman (Elsevier, 2016)
    Zirconium thin films were grown on high carbon steel substrates EN C100 (1 %wt. of carbon) by RF magnetron sputtering. In order to study the reactivity of the film/substrate system as a function of the temperature, one ...
  • Investigation of the Effect of Residual Stress Gradient on the Wear Behavior of PVD Thin Films 
    Article dans une revue avec comité de lecture
    TLILI, Brahim; NOUVEAU, Corinne; GUILLEMOT, Gildas; BESNARD, Aurélien; BARKAOUI, Abdelwahed (Springer Verlag/ASM International, 2018)
    The control of residual stresses has been seldom investigated in multilayer coatings dedicated to improvement of wear behavior. Here, we report the preparation and characterization of superposed structures composed of Cr, ...
  • Test d’usure d’outils modifiés ou non lors du déroulage de MDF 
    Communication avec acte
    AKNOUCHE, Hamid; NOUVEAU, Corinne; BENLATRECHE, Yacine; ROUSSELOT, Christophe; PILLOUD, David; ZERIZER, Abdellatif; MARCHAL, Rémy (2010)
    Des revêtements à base de nitrure de chrome réalisés par pulvérisation triode ont été testés en déroulage et défonçage du bois. L’efficacité des revêtements triode a été montrée en usinage de MDF (Medium Density Fiberboard), ...
  • Tribological Behavior of PVD Hard Coated Cutting Tools under Cryogenic Cooling Conditions 
    Article dans une revue avec comité de lecture
    YOUSFI, Mohammed; OUTEIRO, José; NOUVEAU, Corinne; MARCON, Bertrand; ZOUHAIR, Badr (ELSEVIER, 2017)
    Cryogenic assistance is used to improve machining performance and to enhance tool life under extreme contact conditions (pressure and temperature). This paper focuses on the influence of cryogenic cooling conditions using ...
  • Microhardness and Corrosion Behavior of Ni-SiC Electrodeposited Coatings 
    Article dans une revue avec comité de lecture
    TEMAM, Hachemi Ben; ZEROUAL, Larbi; CHALA, Abdelouahad; RAHMANE, Saad; NOUVEAU, Corinne (Wiley-VCH Verlag, 2007)
    Composite coatings suitable for protection against corrosion were prepared by electrodeposition of chloride-nickel coating containing silicon carbide particles maintained in the suspension. The Ni-SiC composite coatings ...

Browse

All SAMCommunities & CollectionsAuthorsIssue DateCenter / InstitutionThis CollectionAuthorsIssue DateCenter / Institution

Newsletter

Latest newsletterPrevious newsletters

Statistics

Most Popular ItemsStatistics by CountryMost Popular Authors

ÉCOLE NATIONALE SUPERIEURE D'ARTS ET METIERS

  • Contact
  • Mentions légales

ÉCOLE NATIONALE SUPERIEURE D'ARTS ET METIERS

  • Contact
  • Mentions légales