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Piezoelectric amplifiers with integrated actuation and sensing capabilities

Communication avec acte
Author
ccTHOMAS, Olivier
MATHIEU, Fabrice
459 Laboratoire d'analyse et d'architecture des systèmes [LAAS]
MANSFIELD, W.
HUANG, C.
TROLIER MCKINSTRY, Susan
NICU, Liviu
459 Laboratoire d'analyse et d'architecture des systèmes [LAAS]

URI
http://hdl.handle.net/10985/10105
Date
2013

Abstract

We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.

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