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PZT Nanofilm-Based Wafer Scale Nanoresonators

Type
Communications avec actes
Author
DEZEST, Denis
459 Laboratoire d'analyse et d'architecture des systèmes [Toulouse] [LAAS]
MATHIEU, Fabrice
459 Laboratoire d'analyse et d'architecture des systèmes [Toulouse] [LAAS]
MAZENQ, Laurent
459 Laboratoire d'analyse et d'architecture des systèmes [Toulouse] [LAAS]
SOYER, Caroline
1296 Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 [IEMN]
COSTECALDE, Jean
1296 Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 [IEMN]
THOMAS, Olivier
178374 Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécanique [LSIS- INSM]
REMIENS, Denis
1296 Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 [IEMN]

URI
http://hdl.handle.net/10985/10206
Date
2015

Abstract

In this work, we present an unprecedented level of integration of piezoelectric actuation means on arrays of functional nanoresonators at the wafer scale. We use 150-nm thin lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scale. This work paves promising ways for NEMS to be used in configurations where transduction capabilities are integrated at the nanodevice level providing effective fabrication process flow at the wafer-scale.

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