Effect of substrate bias voltage on the microstructure and tribological properties of CrN coatings

Article dans une revue avec comité de lecture
Auteur
AOUADI, Khalil
NOUVEAU, Corinne
BESNARD, Aurélien
127742 Laboratoire Bourguignon des Matériaux et Procédés [LABOMAP]
TLILI, Brahim
300862 Ecole Nationale d'Ingénieurs de Tunis [ENIT]
CHAFRA, Moez
302967 Institut préparatoire aux études scientifiques et techniques [La Marsa] [IPEST]

URI
http://hdl.handle.net/10985/10959
DOI
10.3166/acsm.40.9-15
Date
2016
Journal
Annales de Chimie - Science des Matériaux

Résumé

Microstructure, wear and friction coefficient of cr-based magnetron sputtered layers. CrN films were deposited on stainless steel and silicon substrates via magnetron reactive sputtering under a systematic variation of the substrate bias voltage. The influence of the substrate bias voltage on the structural and tribological properties of the films was investigated. The results indicated that increasing the negative bias voltage have many influence on the characteristic of the coatings: concerning their microstructure, we observed that the grain size increased, while their coefficient of friction is influenced by the bias voltage like the wear rate.

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