Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators
Communication avec acte
Auteur
DEZEST, DenisMATHIEU, FabriceMAZENQ, LaurentSOYER, CarolineCOSTECALDE, JeanREMIENS, DenisTHOMAS, OlivierDEÜ, Jean-FrançoisNICU, LiviuRésumé
In this work, we demonstrate the integration of piezoelectric actuation means on arrays of nanocantilevers at the wafer scale. We use lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scale
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Article dans une revue avec comité de lecture;
THOMAS, Olivier; ; ; ; ; ; ; (IOP Publishing, 2015)
In this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down ... -
Communication avec acte; ; ; ; ;THOMAS, Olivier; (IEEE, 2015)
In this work, we present an unprecedented level of integration of piezoelectric actuation means on arrays of functional nanoresonators at the wafer scale. We use 150-nm thin lead titanate zirconate (PZT) as piezoelectric ...
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Article dans une revue avec comité de lecture; ; ; ;THOMAS, Olivier; ; ; (IOP Publishing, 2020-01)
A piezoelectric nanoelectromechanical system (NEMS) with integrated actuation and detection capabilities was fabricated using lead zirconate titanate (PZT) thin films patterned by microcontact printing. PZT-coated cantilever ...
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Article dans une revue avec comité de lecture;THOMAS, Olivier; ; ; ; ; ; ; (IOP Publishing, 2015)
In this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down ...
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Article dans une revue avec comité de lectureTHOMAS, Olivier; ; ; ; ; (American Institute of Physics, 2013)
We report, in this work, on unprecedented levels of parametric amplification in microelectromechanical resonators, operated in air, with integrated piezoelectric actuation and sensing capabilities. The method relies on an ...