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Effect of Ar/N2 flow ratio on the microstructure and mechanical properties of Ti-Cr-N coatings deposited by DC magnetron sputtering on AISI D2 tool steels

Article dans une revue avec comité de lecture
Auteur
KEHAL, Abdelkrim
252490 Université Mouloud Mammeri [Tizi Ouzou] [UMMTO]
230815 Unité de Recherche Matériaux, Procédés et Environement - URMPE (Boumerdès, Algérie)
SAOULA, Nadia
42013 Centre de Développement des Technologies Avancées [CDTA]
ABAIDIA, Seddik El Hak
230815 Unité de Recherche Matériaux, Procédés et Environement - URMPE (Boumerdès, Algérie)
NOUVEAU, Corinne
127742 Laboratoire Bourguignon des Matériaux et Procédés [LABOMAP]

URI
http://hdl.handle.net/10985/20797
DOI
10.1016/j.surfcoat.2021.127444
Date
2021
Journal
Surface & Coatings Technology

Résumé

Ti-Cr-N coatings were deposited on Si (100) and AISI D2 tool steel substrates by reactive DC magnetron co- sputtering technique from titanium and chromium target in mixed Ar/N2 atmosphere. The Ar/N2 ratio effects on the chemical composition, structure, morphology, intrinsic stress and mechanical properties of the Ti-Cr-N coatings were investigated. The growing process of Ti-Cr-N coatings can be divided into three stages: Stage I, in poisoning mode (low flow ratio 1 < Ar/N2 ≤1.4), Stage II, in transition mode (intermediate flow ratio 1.4 ≤Ar/N2 ≤ 3) and Stage III in metallic mode (Ar/N2 > 3). For all samples, XRD analysis shown the formation of mixed nitrides phases. In stage I, Ti2N, TiN0.3, and hexagonal-Cr2N phases were observed. In Stage II, TiN0.3, Cr2N, and cubic-TiN phases were formed, while only TiN and Cr2N are observed in stage III. The coatings deposited with Ar/N₂ ratio of 3 shows the largest hardness of 24 GPa which is attribute to the dense structure and smoother surface morphology. The properties of the films are discussed in terms of evolution growth stages resulting by the variation of Ar/N2 flow ratios.

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Documents liés

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    Article dans une revue avec comité de lecture
    BOUAOUINA, Boudjemaa; BESNARD, Aurélien; ABAIDIA, Seddik El Hak; HAID, F. (Elsevier, 2017)
    We have investigated the effect of the period thickness of the multilayer Mo2N/CrN deposited on Si substrate produced by reactive magnetron sputtering. Mo2N presents a face centered cubic structure and CrN an orthorhombic ...
  • Correlation between mechanical and microstructural properties of molybdenum nitride thin films deposited on silicon by reactive RF magnetron discharge 
    Article dans une revue avec comité de lecture
    BOUAOUINA, Boudjemaa; BESNARD, Aurélien; ABAIDIA, Seddik El Hak; AIROUDJ, Aissam; BENSOUICI, Fayçal (Elsevier, 2018)
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    PRULIERE, Etienne; AMMAR, Amine; EL KISSI, Nadia; CHINESTA, Francisco (Springer Link, 2009)
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  • Investigation of the Effect of Residual Stress Gradient on the Wear Behavior of PVD Thin Films 
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    TLILI, Brahim; NOUVEAU, Corinne; GUILLEMOT, Gildas; BESNARD, Aurélien; BARKAOUI, Abdelwahed (Springer Verlag/ASM International, 2018)
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