Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)
Article dans une revue avec comité de lecture
Auteur
THOMAS, Olivier
12568 Laboratoire de Mécanique des Structures et des Systèmes Couplés [LMSSC]
178374 Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
12568 Laboratoire de Mécanique des Structures et des Systèmes Couplés [LMSSC]
178374 Laboratoire des Sciences de l'Information et des Systèmes : Ingénierie Numérique des Systèmes Mécaniques [LSIS- INSM]
SOYER, Caroline
1296 Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
1296 Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
COSTECALDE, Jean
1296 Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
1296 Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Date
2015Journal
Journal of Micromechanics and MicroengineeringRésumé
In this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down approach combining ultraviolet (UV) lithography with other standard planar processing technologies allows us to achieve high-throughput manufacturing. Multilayer stack cantilevers with different geometries have been implemented with measured fundamental resonant frequencies in the megahertz range and Q-factor values ranging from ~130 in air up to ~900 in a vacuum at room temperature. A refined finite element model taking into account the exact configuration of the piezoelectric stack is proposed and demonstrates the importance of considering the dependence of the beam’s cross-section upon the axial coordinate. We extensively investigate both experimentally and theoretically the transduction efficiency of the implemented piezoelectric layer and report for the first time at this integration level a piezoelectric constant of d31 = 15 fm.V−1. Finally, we discuss the current limitations to achieve piezoelectric detection.
Fichier(s) constituant cette publication
- Nom:
- LSIS_JMM_2015_THOMAS.pdf
- Taille:
- 1.763Mo
- Format:
- Description:
- Article principal
Cette publication figure dans le(s) laboratoire(s) suivant(s)
Documents liés
Visualiser des documents liés par titre, auteur, créateur et sujet.
-
Communication avec acteDEZEST, Denis; MATHIEU, Fabrice; MAZENQ, Laurent; SOYER, Caroline; COSTECALDE, Jean; REMIENS, Denis; THOMAS, Olivier; DEÜ, Jean-François; NICU, Liviu (2013)In this work, we demonstrate the integration of piezoelectric actuation means on arrays of nanocantilevers at the wafer scale. We use lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent ...
-
Communication avec acteDEZEST, Denis; MATHIEU, Fabrice; MAZENQ, Laurent; SOYER, Caroline; COSTECALDE, Jean; THOMAS, Olivier; REMIENS, Denis (IEEE, 2015)In this work, we present an unprecedented level of integration of piezoelectric actuation means on arrays of functional nanoresonators at the wafer scale. We use 150-nm thin lead titanate zirconate (PZT) as piezoelectric ...
-
Article dans une revue avec comité de lectureSAYA, Daisuke; DEZEST, Denis; WELSH, Aaron J; MATHIEU, Fabrice; THOMAS, Olivier; LEÏCHLÉ, Thierry; TROLIER-MCKINSTRY, Susan; NICU, Liviu (IOP Publishing, 2020-01)A piezoelectric nanoelectromechanical system (NEMS) with integrated actuation and detection capabilities was fabricated using lead zirconate titanate (PZT) thin films patterned by microcontact printing. PZT-coated cantilever ...
-
Article dans une revue avec comité de lectureDEZEST, D; THOMAS, Olivier; MATHIEU, F; MAZENQ, L; SOYER, C; COSTECALDE, J; REMIENS, D; DEÜ, J F; NICU, L (IOP Publishing, 2015)In this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down ...
-
Communication avec acteTHOMAS, Olivier; MATHIEU, Fabrice; MANSFIELD, W.; HUANG, C.; TROLIER MCKINSTRY, Susan; NICU, Liviu (IEEE, 2013)We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method ...